PATTERNED LAYERS IN THIN FILM ACOUSTIC DEVICES (57) ABSTRACT (76 ...

US 2002O166218A1

(19) United States

(12) Patent Application Publication (10) Pub. No.: US 2002/0166218A1

Barber

(43) Pub. Date:

(54) METHOD FOR SELFALIGNMENT OF

PATTERNED LAYERS IN THIN FILM

ACOUSTIC DEVICES

Nov. 14, 2002

(52) U.S. Cl. ............................................. 29/25.35; 29/847

(57)

ABSTRACT

(76) Inventor: Bradley Paul Barber, Chatham, NJ

(US)

The invention relates to manufacturing electromechanical

Correspondence Address:

resonators for use in electromechanical filters. Such filters

Ratner & Prestia

P.O. BOX 7228

require resonators having different resonant frequencies.

Typically all resonators are manufactured having the same

Wilmington, DE 19803 (US)

resonant frequency and the resonant frequency of Selected

resonators is altered by the deposition of additional material

on Selected resonators in the form of additional layers.

According to this invention, these layers are formed coex

tensive with the underlying layers of the resonator by first

patterning larger areas of the added material, then masking

the patterned areas with masks Smaller than the patterned

areas and etching both the underlying layer and the patterned

area without moving the mask.

(21) Appl. No.:

09/853,373

(22) Filed:

May 11, 2001

Publication Classification

(51) Int. Cl. .................................................. H04R 17700

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