PATTERNED LAYERS IN THIN FILM ACOUSTIC DEVICES (57) ABSTRACT (76 ...
US 2002O166218A1
(19) United States
(12) Patent Application Publication (10) Pub. No.: US 2002/0166218A1
Barber
(43) Pub. Date:
(54) METHOD FOR SELFALIGNMENT OF
PATTERNED LAYERS IN THIN FILM
ACOUSTIC DEVICES
Nov. 14, 2002
(52) U.S. Cl. ............................................. 29/25.35; 29/847
(57)
ABSTRACT
(76) Inventor: Bradley Paul Barber, Chatham, NJ
(US)
The invention relates to manufacturing electromechanical
Correspondence Address:
resonators for use in electromechanical filters. Such filters
Ratner & Prestia
P.O. BOX 7228
require resonators having different resonant frequencies.
Typically all resonators are manufactured having the same
Wilmington, DE 19803 (US)
resonant frequency and the resonant frequency of Selected
resonators is altered by the deposition of additional material
on Selected resonators in the form of additional layers.
According to this invention, these layers are formed coex
tensive with the underlying layers of the resonator by first
patterning larger areas of the added material, then masking
the patterned areas with masks Smaller than the patterned
areas and etching both the underlying layer and the patterned
area without moving the mask.
(21) Appl. No.:
09/853,373
(22) Filed:
May 11, 2001
Publication Classification
(51) Int. Cl. .................................................. H04R 17700
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