PDF Lecture 29: Productivity and process yield - NPTEL
cumulative yield of the process is only 83.9. This decrease in overall yield will become more pronounced as the number of process steps increases. There are various factors that a ect the overall fab yield 1.Number of process steps - for a 50 step process to get 75% yield, the individual steps must each have a yield greater than 99.4%. ................
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