SEMI S23-0705

Basis of Conversion Factors in Main Body Table 2. Utility or Material Basis of Conversion Factor (other units) Exhaust Exhaust pressure: 2kPa (200 mm Aq; 8 in H2O) Vacuum Vacuum pressure: 5.88 x 103 Pa (600 mm Aq) Dry Air Supply pressure: 4.9 x 105Pa (71 psi; 5 kg/cm2) Water cooled by refrigeration Water cooled by refrigeration process. ................
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