SEMI
Ballot Review Summary
2012 Cycle 4
REGION: North America
COMMITTEE: EHS
EVENT: SEMICON West 2012
DATE OF MEETING: July 12, 2012
PLACE OF MEETING: San Francisco Marriott Marquis Hotel in San Francisco, California
COMMITTEE CO-CHAIRS: Chris Evanston/Salus, Sean Larsen/Lam Research AG, Eric Sklar, Safety Guru, LLC
SEMI STAFF: Paul Trio
I. Document Number & Title
|Document 4683A |Line Item Revisions to SEMI S2-0310e, Environmental, Health, and Safety Guideline for Semiconductor |
| |Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure |
II-1 Line item 3
|Line Item 3 |Change to applied OEL percentage for normal, maintenance and fault conditions |
1. Tally (Staff to fill in)
Voting Tally: As-cast tally after the close of the voting period
A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶9.6.1)
2. Rejects
Reject 1 (IBM – Ernest Timlin)
Negative 2 of Reject 1
|Nega|Referenced Section |*TF/Committee to fill in if necessary |
|tive| | |
| | | |
| |Reason |*Original negative comment and as well as justification should be included. |
| | |2.)I have attached a set of three spreadsheets developed by the American Industrial Hygiene Association's |
| | |Exposure Assessment Committee members to help illustrate the statistics of air sampling datasets. |
| | |Environmental data is best described by use of Lognormal parametric statistics, because environmental data |
| | |is most typically lognormally distributed. I have attached three spreadsheets of my own making: a.) |
| | |"....Example of all data 1% or less" (Arithmetic Mean= 0.38 (%of the OEL)); b.) ....Example of all data 10% |
| | |or less." (Arithmetic Mean =2.1(%of the OEL)); and c.)"....Example B of all data 10% or less" Arithmetic |
| | |Mean=6.9(%of the OEL)) . In these examples, one can see that in all cases the data are not well described |
| | |by normal parametric statistics, but are well fitted to Lognormal distributions and therefore best described|
| | |by lognormal parametric statistics. What is also illustrated in the examples (a. and b.)is that a set of |
| | |18 datapoints, the first 14 of which are exactly the same and all under 1% or 10%OEL, can show remarkably |
| | |different results in terms of the percent of actual exposures (0% for the ................
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