PDF Manufacturing Process Control - MIT OpenCourseWare
Manufacturing 2.830J/6.780J/ESD.63J 16 • Assumptions - defects are "points" - every defect results in a fault - defects are spatially uncorrelated • Then yield of any given circuit with critical area A c and defect density D 0 is • And for a chip with N circuits each with critical area A c, yield is Poisson Defect Yield Model ... ................
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