SEMI M1-0915
Items 2-8.9b and 2-9.3b, Crow’s Feet — Any anomaly conforming to the definition that is greater than 0.25 mm (0.010 in. for 2 inch and 3 inch diameter wafers) in total length. Item 2-8.10, Craters — Any individually distinguishable surface anomaly conforming to the definition that is visible when viewed under diffused illumination. ................
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