NON-EVAPORABLE GETTERS IN A TURBOMOLECULAR PUMP …
The Hydrogen partial pressure slowly rises over this time from 6.5e-10 Torr to 8.5e-10 Torr. Figure 3: Main chamber Pressure vs. Time plot as turbo is backed by NEG for 54 hours. The NEG’s performance can be improved by a second heating to desorb some adsorbed gas. ................
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