SEMI Standards Doc
The 90’th percentile test is described in ¶ 8.2.1.1. Tukey’s is described in ¶ 8.2.1.2. The logic that applies to determining which test to use is described in ¶ 8.2.1.3. 90’th Percentile Test—If an upper control limit is required the first step is to determine the 90’th percentile values for the reference and test sets. ................
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