Fabrication and Testing of MEMS-Based Micropropulsion …
aJet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA. bSiwave Corp, Arcadia, CA, USA. cMoog Space Products Division, Costa Mesa, CA, USA. ABSTRACT. The development and fabrication of microfabricated propulsion components at the Jet Propulsion Laboratory (JPL) is reviewed. ................
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