SEMI S5-0310



Background Statement for SEMI Draft Document 5892

Revision to SEMI S5-0310 With Title Change From: SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING DEVICES FOR GAS CYLINDER VALVES

To: SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING DEVICES FOR GASES

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Notice: Additions are indicated by underline and deletions are indicated by strikethrough. Text that has been moved is shown as deleted in its original location and added in its new location. Due to software limitations, not all of the numbering changes are indicated.

This ballot consists of proposed changes to address concerns identified in the failed Reapproval ballot for SEMI S5-0310, including:

• Addition of a statement that the release could result from failure anywhere downstream of the cylinder valve.

• Expansion of the scope to include flow limiting devices (FLDs) for applications other than gas cylinder valves

• Updating usages of “material safety data sheet” and “MSDS” to “safety data sheet” and “SDS”

• Addition of consideration of those gases that can react with air to form solids.

• Correction of several grammatical and typographical errors

The ballot results will be reviewed and adjudicated at the meetings indicated in the table below. Check standards under Calendar of Events for the latest update.

Review and Adjudication Information

| |Task Force Review |Committee Adjudication |

|Group: |S5 Revision TF |EHS NA TC Chapter |

|Date: |November 2, 2015 |November 5, 2015 |

|Time & Timezone: |15:30-17:00 PDT |9:00-18:00 PDT |

|Location: |SEMI HQ |SEMI HQ |

|City, State/Country: |San Jose, California/USA |San Jose, California/USA |

|Leader(s): |Eric Sklar (Safety Guru) |Bert Planting (ASML) |

| | |Chris Evanston (Salus) |

| | |Sean Larsen (Lam Research) |

|Standards Staff: |Kevin Nguyen (Knguyen@) |Kevin Nguyen (Knguyen@) |

| |408-943-7997 |408-943-7997 |

Safety Checklist for SEMI Draft Document 5892

Revision to SEMI S5-0310 With Title Change From: SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING DEVICES FOR GAS CYLINDER VALVES

To: SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING DEVICES FOR GASES

Developing/Revising Body

|Name/Type: |Flow Limitation TF |

|Technical Committee: |EH&S |

|Region: |NA |

Leadership

|Position |Last |First |Affiliation |

|Leader |Sklar |Eric |Safety Guru, LLC |

Documents, Conflicts, and Consideration

Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee

|# and Title |Manner of Consideration |

|No other codes, standards, or practices were used in developing this revision proposal. | |

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline

|# and Title |Inconsistency with This Safety Guideline |

|None | |

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical

|# and Title |Nature of Conflict with This Safety Guideline |

|None | |

Participants and Contributors

|Last |First |Affiliation |

|Jumper |Steve |Applied Materials |

|Karl |Edward |Applied Materials |

|Planting |Bert |ASML |

|Crane |Lauren |KLA-Tencor |

|Larsen |Sean |Lam Research |

|Greenberg |Cliff |Nikon Precision |

|Brody |Steven |Product EHS Consulting |

|Sklar |Eric |Safety Guru, LLC |

|Evanston |Chris |Salus Engineering |

|Visty |John |Salus Engineering |

|Fessler |Mark |TEL |

|Barsky |Joseph |TRNA |

|Pochon |Stephan |TRNA |

The content requirements of this checklist are documented in Section 15.3 of the Regulations Governing SEMI Standards Committees.

SEMI Draft Document 5892

REVISION TO SEMI S5-0310 With Title Change To:

SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING DEVICES FOR GASES CYLINDER VALVES

This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 16, 2009. Initially available at in February 2010. Originally published in 1993; previously published July 2003.

NOTICE: This document was completely rewritten in 2009.

Contents

1 Purpose 3

2 Scope 3

3 Limitations 4

4 Referenced Standards and Documents 4

5 Terminology 4

6 Safety Guidance 5

7 Flow Limiting Device Criteria 6

8 Calculations 8

9 Related Document 11

Related Information 1 Critical Pressure Ratios For Several Gases 12

Tables

Table 1 Hazardous Gases for Which Flow Limiting Devices Should be Used 6

Table 2 Critical Nitrogen Flow Rates (QNT) for Flow Limiting Devices 8

Table 3 Mixing Gases 9

Table R1-1 Heat Capacities and Critical Pressure Ratios 13

Figures

Figure 1 Nitrogen Flow Rate 7

Purpose

The purpose of this safety guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases from gas cylinder valves during transportation, storage, and use.

Scope

This safety guideline pertains to flow limiting devices FLDs for valves on cylinders containing hazardous gases. These devices are intended to limit the flow rate of uncontrolled releases of gases at or downstream of the FLDsvalve outlet.

This safety guideline pertains to flow limiting devices operating at critical flow rates that result from cylinder pressures greater than 103 kPa (15 psig).

Generally, flow limiting devices FLDs are not used for cylinders pressurized gases at gauge pressures less than 103 kPa (15psig) because the size required to provide adequate flow for the process is so large that flow reduction resulting from the flow limiting device FLD would be minimal.

This safety guideline pertains to FLDs operating at critical flow rates that result from the ratio of the pressure upstream of the FLD to the pressure downstream of the FLD being at least the critical pressure ratio.

For all gases with at least two atoms in molecule, this ratio is less than two. For monatomic gases (He, Ar, Ne, Xe, Kr), it is 2.04 or 2.05. RELATED INFORMATION 1 contains a table of critical pressure ratios for several gases.

This safety guideline provides a method of identifying flow limiting devices FLDs by size.

This safety guideline provides methods for calculating the approximate maximum and minimum flow rates of several gases, and their mixtures, through such devices.

This safety guideline provides a method for selecting the size flow limiting device FLD for an application, based on the gas and the needed flow.

Specific safety guidance is contained in § 6.

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Limitations

This guideline does not pertain to gas releases caused by failure upstream of an FLD, such as of the:

• cylinder or of the valve connection to the cylinder,

• actuation of the cylinder pressure relief device, or

• some failures of the valve.

This guideline does not pertain to FLDs at which the ratio of inlet pressure to outlet pressure is less than the critical pressure ratio.

FLD manufacturers, gas suppliers, and other qualified personnel can provide assistance is determining FLD behavior for non-critical flow.

Referenced Standards and Documents

SEMI Safety Guidelines

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing Systems

NFPA Standard[1]

NFPA 704 — Standard System for the Identification of the Hazards of Materials for Emergency Response

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Terminology

Abbreviations and Acronyms

MSDS — material safety data sheet [SEMI S12]

FLD — flow limiting device

SDS — safety data sheet

slm — standard liters per minute [SEMI E56, SEMI E69, SEMI E77, SEMI F43, SEMI F70]

Definitions

equivalent orifice — a passage that will allow fluid flow equivalent to the fluid flow allowed by a round hole with an orifice coefficient of 80%.

downstream (adjective) — on the side to which fluid flows.

flow limiting device (FLD) — a device that will reduce maximum flow rate under full flow conditions.

As described in § 2, the scope of this Safety Guideline is limited to flow limiting devices in gas cylinder valves. However, the methods described in this Safety Guideline may be applicable to other uses of flow limiting devices.

flow rate — the quantity of fluid passing a specified point per unit time. Flow rates in this guideline are given in standard liters per minute (slm) at the standard conditions of 0°C (32°F) and 101 kPa absolute (14.7 psia). This corresponds to the standard conditions used for calibration of mass flow controllers used in semiconductor processing systems.

hazardous gases — gases that have a degree of hazard rating in health, flammability, or reactivity of 3 or 4 in accordance with NFPA 704, or equivalent rating by a regional standard.

material safety data sheet — written or printed material concerning chemical elements and compounds, including hazardous materials, prepared in accordance with applicable standards. [SEMI S2, SEMI S26]

mixing gas — an inert gas used to dilute another gas.

orifice coefficient — the ratio of actual flow to the theoretical flow through an orifice.

The orifice coefficient will typically vary from 65% (0.65) for a sharp entrance to 95% (0.95) for a well-rounded entrance. A flow rate tolerance of ±20% is used in Table 1 to allow for variations in the entrance geometry and passage size. Figure 1 illustrates the flow rate variation resulting from this tolerance for different equivalent orifice sizes.

safety data sheet (SDS) — document that describes a chemicals properties and hazards and provides appropriate safety precautions and protective measures for handling, storing, and transporting it.

The specific requirements are stated in regulations. In most jurisdictions of interest, the regulations are consistent with the UN Globally Harmonized System of Classification and Labelling of Chemicals (GHS). GHS is available at

“Safety data sheet” has replaced the term “materials safety data sheet”.

size — designation of a flow limiting device an FLD, stated as the nominal internal diameter of an equivalent orifice.

Table 2 lists several sizes and provides flow rates for several pressures.

upstream (adjective) — on the side from which fluid flows.

Safety Guidance

General

Verification — When a flow limiting device an FLD is required, the user should always verify that the size is identified by tag, label, or marking and verify that the device size indicated matches the requirement. If a required flow limiting device is missing, flow should not be permitted.

Blockage — Some hydrides, such as diborane, can polymerize and cause partial or total obstruction of FLDs. Some hydrides, such as silane, can react with oxygen or water vapor in air to form liquids or solids. Some hydrides can exhibit both behaviors. Care should be taken with containers, piping, and devices that seem to be empty, but may contain product.

Purging — An FLD may restrict gas flow during purging. The user should assure that adequate purging methods are used to prevent plugging the flow limiting device.

This is important to prevent contamination downstream of the flow limiting device and reduce the probability of creating a risk of Medium, High, or Very High, as evaluated in accordance with SEMI S10.

Gas Cylinder Valves

Installation — Only the gas supplier or cylinder owner should install, remove, or otherwise service the flow limiting device. Special equipment and procedures may be required to perform any installation or service operation safely. No other person should install, remove, replace, clean, adjust, or otherwise alter the flow limiting device unless authorized by the cylinder owner.

Verification — When a flow limiting device is required, the user should always verify that the size is identified by tag, label or marking on the cylinder or cylinder valve exterior and that the device size indicated matches the requirement. If a required flow limiting device is missing, the cylinder should be rejected prior to use.

Purging — The addition of a flow limiting device in the cylinder valve may restrict gas flow during purging. The user should assure that adequate purging methods are used to prevent plugging the flow limiting device. As a minimum, the operator should purge the valve outlet after use with the same procedure used for purging the valve outlet just after installation of the cylinder.

This is important to prevent contamination in the valve outlet and reduce the probability of creating a risk of Medium, High, or Very High, as evaluated in accordance with SEMI S10, at the cylinder supplier’s plant.

Blockage — Some hydrides, such as diborane, can polymerize and cause obstruction or total blockage of flow limiting devices. Care should be taken with cylinders that seem to be empty, but may contain product.

Flow Limiting Device Criteria

Where Used — Flow limiting devices should be installed or incorporated into cylinder valves that are used for gas cylinders containing the hazardous gases listed in Table 1. Table 1 lists hazardous gases for which devices are known to be feasible by reason of testing and experience. SEMI encourages testing by its members of hazardous gases not listed in Table 1 so that new information can be added.

Flow limiting devices FLDs should be installed or incorporated into cylinder valves that are used for gas cylinders containing the hazardous gases listed in Table 1.

Hazardous Gases for Which Flow Limiting Devices Should be Used

|Hazardous Gas |Standard Density |Cylinder Pressure (Pcyl)|Compressibility Factor |Compressibility Factor |Max. Flow Rate (q) for|

| |(D), |Typical Max. @ Room |(Z) @ Typ. Max.Cylinder|(z) @ 10% Typ. |a 0.25 mm |

| |1 atm., 0°C |Temp.#1 |Pressure#2 |Max.Cylinder Pressure#2|(0.01 in.) |

| |[kg/m3 (lbs/ft3)] |[kPa_gauge (psig)] | | |Equiv.Orifice [slm] |

|Arsine, AsH3 |3.45 (0.216) |1,410 (205) |0.81 |0.98 |5.5 |

|Carbon Monoxide, CO |1.250 (0.078) |11,385 (1,650) |0.97 |1.0 |63 |

|Diborane, B2H6 |1.250 (0.078) |12,410 (1,800) |0.29 @ 7,000 kPa (1,015|0.93 @ 700 kPa (103 |68 |

| | |(1% in N2) |psi) |psi) |(1% in N2) |

|Germane, GeH4 |3.415 (0.213) |607 (88) |0.94 |0.99 |2.4 |

|Hydrogen, H2 |0.090 (0.0056) |15,180 (2,200) |1.03 |1.0 |303 |

|Nitrogen Trifluoride, |3.200 (0.199) |10,000 (1,450) |0.64 |0.96 |43 |

|NF3 | | | | | |

|Phosphine, PH3 |1.519 (0.095) |4,095 (594) |0.52 |0.95 |29 |

|Silane, SiH4 |1.433 (0.090) |8,280 (1,200) |0.36 |0.94 |70 |

|Stibine, SbH3 |1.444 (0.090) |--- |--- |--- |--- |

Cylinder pressures will vary, consult gas supplier to verify the actual cylinder pressure.

Compressibility factors are interpolated from available data, consult gas supplier for alternate pressures.

FLDs may be installed or incorporated in other devices or locations or for other gases as a means of mitigating the risk of gas flows higher than what is desired.

The use of “should” in ¶ 7.1.1 means that the use of FLDs as described in that paragraph is a conformance criterion of this Safety Guideline. The use of “may” in ¶ 7.1.2 means that the use of FLDs as described in that paragraph is permissible, but is not a conformance criterion of this Safety Guideline. If an FLD is used as permitted by ¶ 7.1.2, the other conformance criteria of this document apply to that use.

Materials — The flow limiting device should be made of materials that are compatible with the gas in the cylinder.

Installation — The flow limiting device should be installed by the gas supplier or cylinder owner (see § 6).

Identification — The preferred method of identifying flow limiting devices FLDs is by equivalent orifice size as shown in Table 2. Other means of identification, requiring identification by the supplier as to the device installed, may be used if unambiguous.

[pic]

Nitrogen Flow Rate

Critical Nitrogen Flow Rates (QNT) for Flow Limiting Devices

|Equivalent Orifice Size|Critical Flow Rate (slm) of nitrogen at the following cylinder pressures: |

| |700 kPa gauge |2100 kPa gauge |7000 kPa gauge |21000 kPa gauge |

| |(102 psig) |(305 psig) |(1015 psig) |(3045 psig) |

|mm |inch |min. |nom. |max. |min. |

|Argon, Ar |1.788 (0.111) |17,180 (2,490) |0.93 |0.99 |81 |

|Helium, He |0.179 (0.011) |17,180 (2,490) |1.1 |1.0 |235 |

|Nitrogen, N2 |1.250 (0.078) |17,180 (2,490) |1.0 |1.0 |93 |

If the substance is a gas mixture, calculate the density using Equation 1:

[pic] (1)

where:

D = density of the mixture

Vg = volume fraction of each component in the mixture

Dg = density of each component in the mixture, obtained as described in ¶ 8.2.1.1

n = the number of components in the mixture

In some mixtures, one or more of the components may be a substance usually considered a liquid, rather than a gas. For such substances, it is necessary to use the density of the vapor phase, not the density of the liquid phase, in this calculation.

For example, what is the density for a mixture of 5% arsine and 95% nitrogen?

D = (0.05 × 3.45) + (0.95 × 1.25) = 1.36 kg/m3 ()

Determine the ratio of the flow rate of the gas (or gas mixture) to the flow rate of nitrogen under the same conditions, using Equation 2.

[pic] (2)

where:

rf = ratio of the flow rate of the gas to the flow rate of nitrogen under the same conditions

Z = compressibility factor at Pupcyl for the gas, found in Table 2 or 3 or a published reference. For pressures not listed, interpolation of Z with Z assumed proportional to pressure and equal to 1.0 at zero pressure should provide adequate accuracy in the pressure and temperature ranges found in this document. For gas mixtures with the one gas 95% by volume or greater, use of Z for that gas should provide adequate accuracy, for lower percentages consult the gas supplier.

For example, what is the ratio of the flow rate of nitrogen trifluoride to that of nitrogen?

[pic] = 0.635 (Z is interpolated at 700 kPa)

Determine the flow of nitrogen for the orifice size and upstream cylinder pressure of interest.

If the orifice size and upstream cylinder pressure of interest are included in Table 2, read the flow rate from that Table.

If the upstream cylinder pressure of interest is not included in Table 2, calculate the critical flow of nitrogen, using Equation 3.

QN = QNT × (Pupcyl + Patm)/(PNT + Patm) (3)

where:

QN = critical flow rate in slm of nitrogen at Pcyl

QNT = critical flow rate in slm of nitrogen from Table 2 that corresponds to a given equivalent orifice size and upstream cylinder pressure PNT

Pcyl Pup = gauge pressure kPa gauge (psig) in the gas upstream of the flow limiting device FLD cylinder for which the flow rate is being calculated

Patm = standard atmospheric pressure: 101 kPa absolute (14.7 psia) at sea level

PNT = pressure in kPa gauge (psig) from Table 2 that produces critical flow rate QNT for a given equivalent orifice size

This equation is valid only for ideal gases and critical flow that results for most gases when ratio of the pressure upstream of the FLD to the pressure downstream of the FLD is at least the critical pressure ratio (rcp).Pcyl/Patm [pic] 2. However for nitrogen at temperatures between −54 to +60°C (−65 to +140°F) and at upstream cylinder pressures less than 21,000 kPa gauge (3045 psig), the result will be accurate within a few percent.

For example, what is the minimum flow rate of nitrogen through a 0.25 mm (0.01 inch) equivalent orifice at 862 kPa gauge (125 psig)?

QN = 2.90 × [pic]= 3.5 slm nitrogen

(QNT= 2.90 is the minimum flow rate at 700 kPa gauge, the minimum flow rate for a 0.25 mm orifice at any pressure listed in Table 2 will provide the same result.)

For example, what is the maximum flow rate of nitrogen through a 0.25 mm (0.01 inch) equivalent orifice at 12,414 kPa gauge (1,800 psig)?

QN = 4.35 × [pic]= 68 slm nitrogen

(QNT= 4.35 is the maximum flow rate at 700 kPa gauge.)

Determine the flow rate of the gas (or gas mixture) of interest, using Equation 4.

[pic] (4)

where Q = critical flow rate in slm of the gas (or gas mixture) at Pcylup

Size of a Flow Limiting Device

Identify the minimum upstream cylinder pressure for which flow limitation is needed, Pmin.

Identify the minimum acceptable flow rate of the gas (or gas mixture) of interest, Qmin.

Calculate the pressure-corrected flow rate, Qpc, at the pressure included in Table 1 that is closest to Pmin, using Equation 5.

[pic] (5)

where PT = pressure in kPa gauge (psig) from Table 2 that is closest to Pmin

Determine the ratio of the flow rate of the gas (or gas mixture) of interest to the flow rate of nitrogen, rf, as described in § 8.2.

Calculate the equivalent nitrogen flow rate, QNeq, using Equation 6.

[pic] (6)

Identify the flow limiting device size, using Table 2. Under the heading of the upstream cylinder pressure used in calculating Qpc , in the column headed “min.,” identify the row that has the smallest number that is not smaller than QNeq. The flow limiting device size is in the first two columns of that row.

The method in § 8.2 can be used to determine the maximum flow rate through the selected flow limiting device at the maximum upstream cylinder pressure.

For example, what is the appropriate orifice size to provide a minimum flow of 15 slm of 5% arsine in hydrogen at a minimum upstream cylinder pressure of 500 kPa gauge?

• The pressure-corrected flow rate, Qpc, at the pressure included in Table 1 that is closest to Pmin, can be calculated using Equation 5:

Qpc = 15 slm × (700 kPa + 101 kPa) / (500 kPa + 101 kPa) = 19.99 slm

• The density of this mixture can be calculated using Equation 1:

D = (0.95 × 0.090) + (0.05 × 3.45) = 0.258 kg/m3

• The ratio of flow rate of the gas mixture to the flow rate of nitrogen under the same conditions can be calculated using Equation 2:

rf = (1.25 kg/m3 / (1.00 × 0.258 kg/m3))0.5 = 2.201

• The equivalent nitrogen flow rate, QNeq, can be calculated using Equation 6:

QNeq = 19.99 slm / 2.201 = 9.08 slm

• In the 700 kPa portion of Table 2, the smallest “min.” flow rate that is not less than 9.08 slm is 11.6 slm. This corresponds to an equivalent orifice size of 0.50 mm (0.02 in).

• This selection can be checked, using the method described in § 8.2:

• The minimum nitrogen flow of nitrogen through a 0.50 mm equivalent orifice at 500 kPa can be calculated using Equation 3:

QN = 11.6 slm × (500 kPa + 101 kPa) / (700 kPa + 101 kPa) = 8.70 slm

• The minimum flow of the gas mixture can be calculated using Equation 4:

Q = 2.201 × 8.70 slm = 19.15 slm

This indicates that the selected equivalent orifice size is large enough to provide the identified minimum flow.

• Similarly, the method of § 8.2 can be used to determine the maximum flow for a full cylinder (14,000 kPa (2030 psig)) of the mixture through the identified equivalent orifice:

• The maximum nitrogen flow of nitrogen through a 0.50 mm equivalent orifice at 14,000 kPa can be calculated using Equation 3:

QN = 153 slm × (14,000 kPa + 101 kPa) / (7000 kPa + 101 kPa) = 304 slm

• Because the pressure in a full cylinder of the mixture is high enough that the compressibility of hydrogen is not 1.00, it is appropriate to calculate the ratio of mixture flow to nitrogen flow at the higher pressure, using Equation 2:

rfull = (1.25 kg/m3 / (1.03 × 0.258 kg/m3))0.5 = 2.169

• The maximum flow of the gas mixture can be calculated using Equation 4:

Q = 2.169 × 304 slm = 659 slm

This is the maximum available flow rate of the mixture immediately downstream of the flow limiting device when the cylinder is full.

Related Document

CGA Standard[2]

CGA V-9 — Compressed Gas Association Standard for Compressed Gas Cylinder Valves

CRITICAL PRESSURE RATIOS FOR SEVERAL GASES

NOTICE: This Related Information is not an official part of SEMI S5 and was derived from the work of the global EH&S Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

Determination of Critical Pressure Ratio

The critical pressure ratio (rcp)is determined from the ratio (() of heat capacity at constant pressure (Cp) to the heat capacity at constant volume (Cv) by:

[pic] (R1-1)

Critical Pressure Ratios

The values in Table R1-1 are provided for the readers’ convenience. The heat capacity data were obtained from various sources in the open literature. The critical pressure ratios were calculated as part of preparation of this document.

Heat Capacities and Critical Pressure Ratios

|Gas |Heat Capacity at |Heat Capacity at |Ratio of |Critical |

| |Constant Pressure (CP) |Constant Volume (CV) |Heat Capacities |Pressure |

| |[kJ/(kg K)] |[kJ/(kg K)] |γ ’ CP/CV |Ratio, rcp |

|Acetylene |1.69 |1.37 |1.23 |1.79 |

|Air |1.01 |0.718 |1.41 |1.90 |

|Ammonia |2.19 |1.66 |1.32 |1.84 |

|Argon |0.52 |0.312 |1.67 |2.05 |

|Bromine |0.25 |0.2 |1.25 |1.80 |

|Butane |1.67 |1.53 |1.09 |1.71 |

|Carbon dioxide |0.844 |0.655 |1.29 |1.83 |

|Carbon disulphide |0.67 |0.55 |1.22 |1.78 |

|Carbon monoxide |1.02 |0.72 |1.42 |1.90 |

|Chlorine |0.48 |0.36 |1.33 |1.85 |

|Chloroform |0.63 |0.55 |1.15 |1.74 |

|Ethane |1.75 |1.48 |1.18 |1.76 |

|Ethylene |1.53 |1.23 |1.24 |1.80 |

|Helium |5.19 |3.12 |1.66 |2.05 |

|Hydrogen |14.32 |10.16 |1.41 |1.90 |

|Hydrogen Chloride |0.8 |0.57 |1.40 |1.90 |

|Krypton |0.25 |0.151 |1.66 |2.05 |

|Methane |2.22 |1.7 |1.31 |1.84 |

|Methyl butane | | |1.08 |1.70 |

|Methyl chloride | | |1.20 |1.77 |

|Methyl ethyl death |1.67 |1.48 |1.13 |1.73 |

|N-butane | | |1.18 |1.76 |

|Neon |1.03 |0.618 |1.67 |2.05 |

|Nitric Oxide |0.995 |0.718 |1.39 |1.88 |

|Nitrogen |1.04 |0.743 |1.40 |1.89 |

|Nitrogen tetroxide |4.69 |4.6 |1.02 |1.66 |

|Nitrous oxide |0.88 |0.69 |1.28 |1.82 |

|Oxygen |0.919 |0.659 |1.39 |1.89 |

|Propane |1.67 |1.48 |1.13 |1.73 |

|Propene (propylene) |1.5 |1.31 |1.15 |1.74 |

|R-11 | | |1.14 |1.73 |

|R-114 | | |1.09 |1.70 |

|R-12 | | |1.14 |1.73 |

|R-123 | | |1.10 |1.71 |

|R-134a | | |1.20 |1.77 |

|R-22 | | |1.18 |1.76 |

|Sulfur dioxide |0.64 |0.51 |1.25 |1.81 |

|Xenon |0.16 |0.097 |1.65 |2.04 |

NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guideline(s) set forth herein for any particular application. The determination of the suitability of the safety guideline(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These safety guidelines are subject to change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this safety guideline. Users of this safety guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.

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[1] National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, USA. Telephone: 617.770.3000; Fax: 617.770.0700;

[2] Compressed Gas Association, Inc., 4221 Walney Road, 5th Floor, Chantilly, VA 20151, USA. Telephone: 703.788.2700; Fax: 703.961.1831;

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DRAFT

Document Number: 5892

Date: 8/26/2015

LETTER BALLOT

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