A&R Template 4.4



Ballot Review Summary

2014 Cycle 4

REGION: North America

COMMITTEE: Liquid Chemicals

EVENT: SEMICON West 2014

DATE OF MEETING: July 08, 2014

PLACE OF MEETING: San Francisco Marriott Marquis Hotel in San Francisco, California

COMMITTEE CO-CHAIRS: Frank Flowers/PeroxyChem, Frank Parker/ICL

SEMI STAFF: Michael Tran

A&R Voter: Name/Company

Date: 200X/MM/DD

I. Document Number & Title

|Document 5675 |New Standard: Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid|

| |Chemical Distribution Systems By Contact Profilometry |

II. Tally (Staff to fill in)

Voting Tally: As-cast tally after close of voting period

A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶ 9.6.1)

|A&R | |Not approved |

| |Reason: |

III. Rejects

Reject 1 - Gan Yang (Harbin Institute of Technology)

Negative 1 of Reject 1

|Negative|Referenced Section |*TF/Committee to fill in if necessary |

| | | |

| |Reason |*Original negative comment and justification should be included. |

| | |For curved samples, first-order flattening is not enough to remove bow in CP profiles. Second order |

| | |flattening is thus required to do this. Please take this into account when drafting the standard. |

|Withdrawal |X |No withdrawal made |GO TO “Related” section |

| | |Withdrawal document received by staff on XXXX |GO TO “Final” ( (A) |

|Related |Motion and Reason |X |“Related” is mutually agreed upon. |

| | | |*This motion can be appended to the motion for Persuasive (See Persuasive Section) |

| | | |Negative is related (needs over 1/3 votes to pass) |

| | | |Negative is not related (needs 2/3 or more votes to pass) |

| | | |Reason |XXXX |

| |Motion by/2nd by |Name (Company)/Name (Company) |

| |Discussion | |

| |Result of Vote (check |XX-XX |

| |ONE) | |

| | | |[Negative is related] > 1/3 |GO TO “Persuasive” |

| | | |[Negative is not related] < 2/3 | |

| | | |2/3=< [Negative is not related] |GO TO “Final” ( (B) |

| | | | | |

|Persuasi|Motion and Reason |X |Negative is related and persuasive (needs over 1/3 votes to pass) |

|ve | | | |

| | | |Negative is related and not persuasive (needs 2/3 or more votes to pass) |

| | | |Reason |I was doing some modeling to assess the effect of second versus first order flattening |

| | | | |on results for the worst case scenario (a pipe sample with the smallest radius of |

| | | | |curvature we allow.) In this case the roughness increase due to curvature would be > 100|

| | | | |nm when a first order flattening is performed. This large increase is not acceptable. |

| | | | | |

| | | | |I recommend to accept the reject and either: |

| | | | |- Recommend a smaller scan length |

| | | | |Or: |

| | | | |- Recommend to just perform axial scans on curved samples once the curvature is larger |

| | | | |than a certain threshold. |

| | | | | |

| | | | |I apologize for the inconvenience, but I think the reject is valid. |

| |Motion by/2nd by |Chuck Dale (General Electric) / Koh Murai (Mega Fluid Systems) |

| |Discussion |None. |

| |Result of Vote (check |10-0 |

| |ONE) | |

| | |X |[Negative is related and persuasive] > 1/3 |GO TO “Final” ( (E) |

| | | |[Negative is related and not persuasive] < 2/3 | |

| | | |2/3= ................
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