Remotely floating wire-assisted generation of high-density ...

Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass

Cite as: J. Appl. Phys. 125, 063304 (2019); Submitted: 17 November 2018 . Accepted: 29 January 2019 . Published Online: 13 February 2019

Thi-Thuy-Nga Nguyen , Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa , and Masaru Hori

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J. Appl. Phys. 125, 063304 (2019); ? 2019 Author(s).

125, 063304

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