SEMI M1-0915
SEMI MF1388 — Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors ... None Wafer Category 1.16.1 1.16.2 1.16.3 2-1.1 Growth Method Supplier Option of Cz or MCz 2-1.3 Conductivity Type p 2-1.4 Dopant Boron 2-1.6 FQA radius 223 mm 223.5 mm#3 2-1 ... ................
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