SEMI M1-0915
Mark field height, as defined by the distance between the centers of the topmost and bottommost dot rows of the A/N characters, shall be 1.62 ± 0.03 mm (see Note 3). Mark field length, as defined by the distance between the centers of the leftmost and rightmost dot columns of the A/N characters, shall be 16.43 ± 0.07 mm. ................
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