SEMI M1-0915

Mark location (center of bottommost dot rows) relative to the reference point of the SEMI T7 mark shall be 1.40 ± 0.05 mm toward the wafer center, as shown in Figure 3. Mark field height, as defined by the distance between the centers of the topmost and bottommost dot rows of the A/N characters, shall be 1.62 ± 0.03 mm (see Note 3). ................
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