Sentaurus TCAD Training for CMOS Application

[Pages:316]Sentaurus TCAD Training for CMOS Application

Predictable Success

Course Outline

? Sentaurus TCAD Overview ? Sentaurus Workbench ? Sentaurus Process 1D & 2D ? Tecplot SV ? Sentaurus Structure Editor ? Building Meshes ? Sentaurus Device I-V simulation ? Inspect

? 2007 Synopsys, Inc. (2)

Predictable Success

Course Outline

? 90nm nMOSFET Exercise ? C-V Device Simulation ? Breakdown Device Simulation ? pMOSFET Device Simulation ? Ligament introduction ? SolvNet Resources

SolvNet Introduction 2D Strained Silicon 45nm CMOS Reference Flow Demo 3D nMOSFET Demo

? 2007 Synopsys, Inc. (3)

Predictable Success

Synopsys TCAD Overview

Predictable Success

TCAD Application Areas

Opto

?LED, LASER ?Image sensor ?Photodetector ?Solar cell

RF

?High-speed device ?Compound semiconductor

Base

Emitter

Al0.3Ga0.7As

GaAs

Collector

CMOS

?Deep submicron transistor ?Sophisticated models ?Atomistic modeling

TCAD Application

Markets

Memory

?Flash ?DRAM

Power

?Complex structure & process ?Mixed mode simulation

? 2007 Synopsys, Inc. (5)

Predictable Success

Sentaurus Product Family

Sentaurus Workbench

Sentaurus Library

Sentaurus Structure

Editor

Technology Development

Sentaurus Process Sentaurus Device

Flexible Framework Environment

Advanced Visualization

2D/3D Process Simulation

Calibration Library Structure Editor Interface

2D/3D Device Simulation

Structure Editor and Mesher Application Specific Options

Calibration Manufacturing Control

Sentaurus TFM PCM Studio

Process Compact Models

Based on Calibrated Flow Links Process Variation and

Device Performance

Integrated TCAD Flow from Development to Manufacturing

? 2007 Synopsys, Inc. (6)

Predictable Success

Framework

? Provides a GUI-based simulation

environment

? Organizes simulation projects, runs

and results

? Allows large Design of Experiment

(DOE) and statistical analysis

? Manages job scheduling & network

computing

? Enables interactive visualization

and analysis of simulation results

? 2007 Synopsys, Inc. (7)

Predictable Success

TCAD Product Architecture

Sentarus Workbench

Sentaurus Device Editor

Sentaurus Device

Sentaurus Process Sentaurus Process

Mesh

PCM Studio

? 2007 Synopsys, Inc. (8)

Predictable Success

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