Operation Procedures for FIB620 FIB/SEM



OPERATION PROCEDURES FOR FIB620 FIB/SEM

General Comments

Normally the system will be left in the power ON (“ready”) condition; i.e., all circuits will be continuously energized, chamber and both FIB and SEM columns will be under vacuum, and both VACUUM and HIGH TENSION lamps on the left side of control panel are lit. If system is not in such condition then do not attempt to operate the FIB or SEM, but seek help from NISP personnel. If the microscope is in “ready” condition then proceed with the following procedure.

I. Starting session

1. Check logbook; make sure that there are no problems reported by previous user. Write down your name and exact time to the nearest minutes for starting and ending your session in the logbook. You must have reservation for the tool to start your session.

2. If you are the first user for the day then update pressure and beam parameter values in the spreadsheet on the fibserver computer and save the file. Inform NISP staff if you notice that one of the parameters has significant deviation from the historic values.

II. Mounting sample

1. Securely mount sample on standard SEM stub, ensuring grounding path for removal of electrostatic charge from the specimen. Ask for assistance if you are unsure on mounting the sample or if you experiencing charging problems.

III. Inserting specimen

1. If you are the first user for the day, then initialize stage by clicking “Stage” and “Home”

2. On the system computer, in “Settings” mode under VACUUM control area (upper right screen), click on VENT.

3. Click “Yes “to confirm, and wait about 10 minutes for the chamber to reach atmosphere pressure. Once pressure in the chamber reaches atmosphere, door of the chamber will open with very little force.

4. Put on gloves, use tweezers, and under any circumstances do NOT touch specimen or anything inside of the system with bare hands.

5. Insert SEM stab with specimen into holder on the stage, and secure it with the setscrew. Finger-tight screw with the Allen wrench.

6. Close the chamber door slowly and carefully, while observing specimen height on the video monitor to make sure that the specimen will not touch anything within the chamber as the door is closed. Do not slam the door - you may cause severe damage to liquid-metal ion source and electron source.

7. Push the door firmly and click “Pump” in “Vacuum” window of “Settings” menu.

8. Wait for the message “Vac OK” the vacuum window and wait for vacuum level to be in 5x10-5 mBar or lower range.

III. Obtaining image and setting sample stage to eucentirc height

1. Verify that “High Tension” button, located on left hand side of the operator console, is lit.

2. Change active beam to E-Beam either by clicking on “E” button on GUI, or by opening “Beam” menu and choosing “E-Beam”

3. Change DETECTORS to SE (secondary electron), and click on TV mode.

4. Default acceleration voltage for SEM is 10KV, however it can be changed to any value available in the “Beam” menu.

5. Select spot size from BEAM menu. Spot size 3 is default for general usage.

6. In “Settings” menu within E-Beam window lick on the accelerating voltage button (10 kV) to start SEM accelerating potential.

7. Select the lowest magnification under MAG pull-down menu or by turning “MAGNIFICATION” knob on the keyboard fully counterclockwise.

8. Adjust contract and/or brightness to obtain un-saturated image.

9. Use “COARSE” and “FINE” focus knobs to obtain reasonably sharp image.

10. Increase magnification to x200 ~ x300 and focus again.

11. Take a look on the chamber view monitor and verify that sample is on the safe distance from the polepiece of the column (rule of thumb applies).

12. Release locking handle of the tilt axis and slightly tilt the stage, while watching SEM image for the displacement and verifying on chamber view monitor that sample remains on the safe distance from internal components of the chamber.

13. As you observe SEM image shift up or down while sample is tilted, slowly correct the shift by rotating Z displacement knob.

14. Continue tilting the sample and correcting its height, until position of the SEM image remains stable while stage is rotated between “0 Degrees” and “52 Degrees” positions under magnification x200 ~ x300.

IV. Moving specimen around

1. There are no means to move sample manually in X/Y directions, only motorized motion is possible.

2. The TRACK (double circles with a stick) mode is a free movement device, allowing variable speed and continuous directional change.

3. The GET (plus sign “+”) icon on the shortcut bar is used to bring an object to the center of the screen by placing the cross over the object and double clicking on the mouse left-hand button.

4. The SHIFT (palm sign as like a hand) icon on the shortcut bar is the image shift which is recommend to be used at high magnification (>5,000x).

5. Image can be rotated by “Scan Rotation” slider in “Stage” window of “Settings” or “Milling” menu, but it does not physically rotate the sample.

6. Sample can be rotated by “Rotation” slider in “Stage” window.

7. Sample can be rotated quickly by entering rotation angle value into the R field of “Stage” window under “Settings” or “Milling” menu

V. SEM observation

1. Click on TV icon, and refocus, either by rotating FOCUS knobs on the operator panel, or by holding down right button of the mouse while dragging the mouse in the left/right direction over the SEM image.

2. Do not change the aperture, only the #3 aperture is used at this time. Note that aperture 1 may only be used at low voltages, ................
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