CHAPTER: HISTORY of ION IMPLANTATION in …
1963 J.O. McCaldin, & A.E. Widmer, "Silicon heavily doped by energetic cesium ions," J. Phys. Chem. Solids 24, 1073-80 (1963) 1964 Mar 26 M. Waldner & P.E. McQuaid, "Characteristics of silicon p-n junctions formed by sodium and cesium ion bombardment," Solid State Electronics 7, 925-31 (1964); & "In drift effect in silicon p-n junctions formed ... ................
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