REVISION - Arizona State University



|[pic] |Document Owner: |Release Date: |

|FLEXIBLE DISPLAY CENTER | |10/07/2015 |

| |Korhan Kaftanoglu | |

|Document Title: ORBOTECH SPECS |Document No: |Document Rev: 01 |

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|SIGNATURES FOR RELEASE OR HISTORY ON FILE IN PRODUCT |Confidential Proprietary |

|SPECIFICATIONS | |

|ORIGINATOR: |The information contained in this document is the property of the Flexible Display Center at Arizona State |

| |University. No information contained in this document may be disclosed outside of the Flexible Display |

| |Center at Arizona State University at any time. |

|RESPONSIBLE ENGINEER: | |

|Korhan Kaftanoglu | |

|DIRECTOR OF OPERATIONS: | | |

|Mark Strnad | | |

Table of Contents

1.0 SCOPE 3

1.1 Definitions 3

2.0 EQUIPMENT + SUPPLIES REQUIRED 3

2.1 Test Equipment 3

2.2 Supplies 3

3.0 SAFETY 4

3.1 Avoid exposure to laser…………………………………………………………………………………..4

4.0 PROCEDURES ……………………………………………………………………………………...5,6,7

5.0 SEPARATE DOCUMENTS…………………………………………………………………………….8

5.1 Stress Gauge Weekly…………………………………………………………………………………...…8

6.0 ROUTINE MAINTANENCE……………………………………………………………………………9

6.1 Reference Check……………………………………………………………………………...…………..9

7.0 ADDITIONAL REFERENCE MATERIAL……………………………………………………………10

7.1 Tencor………………………………………………….……………………………………………...…10

List of Figures

1. SCOPE

1. Definitions: The Orbotech FPI-7098M performs optical inspection of active matrix arrays on glass or other substrates to detect both critical and potentially critical defects to increase the yield in the manufacturing process.

2. EQUIPMENT AND SUPPLIES

1. Scanner. The main unit is where the operations are performed. AOI computer used for scanning is stored behind the bottom left panel of the scanner. All AOI operation is performed by this computer. The keyboard and monitor are at the table in front of the scanner.

2. Electronics Cabinet located behind the scanner. Hosts all the control boards for the scanner.

3. Sun system located on the left side of the scanner. All the output files are stored in here. The username and password for the system are both “fpd”

4. PC Interface. There are 2 Windows PC computers hooked up to the system. One laptop by AOI computer and one desktop next to the Sun station. These computers are NOT connected to the ASU network at the time being. These computers are used for copying files as well as using Eyes2020 software to investigate defects.

5. Supplies

1. 6” Wafer Alignment tool

3. SAFETY PROCEDURES

1. Obey lab safety protocols

2. Do not open the side panels while the machine is in operation

4. OPERATIONS

1. Turning on the tool

1. Press the green Start Button located on the left side of the scanner plastic wall.The system follows a set routine and turns on all units, including the workstation. It will take ≈ 3 minutes.

2. The SF044001 Console Login will be displayed on the Computer Screen.

3. If the SFO44001 Console Login is not displayed, press Enter.

4. Enter fpd using the in response to the login query and press Enter.

5. At the password query type in fpd and press Enter.

1. HI! ORBOTECH USER! HAVE A GOOD DAY!

2. The Clock Icon, Console Icon, and Bin/Csh Icon will be displayed on the computer screen.

6. Using the right mouse button click on the blue background of the screen, the Work Space menu will be displayed.

7. A sub menu will be displayed, open the sub menu using the right mouse button select Fpd.

8. Using the right mouse button, select run Fpd from the next menu.

1. Note: The system will download the scan programs; there is a ≈ 30 second delay.

2. The Orobtech Logo will be displayed.

9. Place the cursor on the Operator Line using the M1 mouse button and press Enter.

10. The cursor will automatically go to the Password Line, press Enter.

1. The Main Menu is displayed.

2. The system will automatically begin the initialization procedure.

3. An INIT message will flash in the status box located at the top right-hand corner of the screen. The initialization window is displayed until all subsystems have successfully started.

4. If any item fails to initialize (most likely Z stage), hit “Reinitialize” button.

5. The READY light will be displayed in the status box when INIT is completed.

11. Click on Load icon from the main menu.

12. Click on Unload from the Learn Screen.

1. The stage will be lowered.

2. Local Mode Scan

1. Scanning Gen II panels

1. Confirm the configuration file settings

1. Click “Maintenance” on the right panel of AOI Mode

2. Right click “Service” and hold

3. Slide down to “Files” and slide right

4. Release mouse button on “Configuration”

5. Scroll down until the lines “Panel_init_loc_loader_shift.x =……” is seen.

6. Change the X value to = -235

7. Change the Y value on the next line to =-49

8. Right click anywhere and hold

9. Scroll right on “File”

10. Scroll on “Save” and release mouse button

11. Click “Update System” on the top

12. Click the pin on top left to close window

13. Click “Exit Maintenance”

2. Load the panel on the platform

1. Confirm the notch in the glass is at bottom left

2. Confirm the bottom right aligns with the guide on the platform

3. Look for the lot and panel number on the substrate

3. Enter lot and scan information on the system

1. Click local

2. Write the lot number based on the naming convention reported on traveler

3. Double click on the lot number just written

4. Press the “Copy” key on the keyboard

5. Pick the program written on the traveler from the list below

6. Click “OK”

7. Click “OK” on “Manual Load Window” popup

4. Align the panel and enter panel information

1. Find the alignment mark by left clicking and driving the camera on the “Video screen”.

1. If screen is too dark or too bright, adjust the brightness by trying different “Shutter numbers” below the video. Try lower numbers to make the video darker, and higher to make it brighter.

2. Drive the alignment “X” to the center of the alignment mark

3. Click on the “Apply” at the right side of the screen

4. Perform the same alignment operation to the second alignment mark by driving the X to the center of the alignment mark

5. Click “Apply”

6. Click “Perform alignment”

7. Enter the panel ID based on the naming convention on the “Manual Panel ID”

8. The system should start scanning right now followed by taking up to 200 pictures of the defects in the panel. Once the operation is completed, the next window should look like the picture below

5. Go through the defects

1. Select the first defect on the list, and hold the mouse down scroll till the bottom in the list. The camera will go through every defect fast.

2. Note down the coordinates of any abnormalities. These include unusually large defects covering a very large area, missing stack islands, multiple missing lines.

1. Go to the defect that has the abnormality by clicking on that defect

2. Note down the X and Y coordinates given below the “Video” screen

3. To move around the defects the operator can click the arrow keys. This will move the stage in predetermined step size. Right clicking and holding the arrow keys will keep the stage moving in the direction until mouse is released.

4. To focus on a defect with topography, click on the “Focus” arrows below the “Video” screen. The arrows point the way the STAGE move, therefore clicking the down arrow will result in lowering the stage, thus making the microscope focus on a particle above the panel. Clicking the up arrow will raise the stage making the microscope focus further into the layers and the substrate. Right clicking on the arrows and holding will result in continuous stage movement in the Z direction. The focus goes back to normal when another defect is selected.

5. To zoom in to a defect click on the arrows next to “Zoom” mellow the video screen.

6. To adjust the brightness of the video, use the numbers in the “Shutter” setting as explained previously in 4.2.1.4.1.1

3. Once gone through the 20 defects in the list, scroll down through the defect list and continue until the defect list is completed.

4. Note down the number of defects on the traveller

6. Click “Terminate Verify” to save the file

1. The unload screen will show the panel ID and number of defects at the lower left of the screen.

7. Unload the panel from the stage

8. Click “Unload” one more time on the next popup window.

9. Write down the panel info and the recipe used to the log book

3. Scanning 6” wafers

1. Confirm the configuration file settings using methods in 4.2.1.1. Use the values below

1. Change the X value to = -298

2. Change the Y value on the next line to =-188

2. Load the wafer alignment piece on the platform as shown in the picture below

1. Confirm the piece is steady and not moving

3. Load the wafer using the vacuum handler and put it inside the metal alignment piece on the panel.

1. The bottom of the wafer (flat side) should be facing left side and positioned to barely touch the two notches inside the alignment piece.

4. Look for the lot and panel number on the substrate

5. Follow the scanning procedures explained in 4.2.1.3 through 4.2.1.9

4. Copy the files to Q drive and run LaserMan

1. Log in to the Windows computer in front of the tool using the credentials “fpd” for both username and password

2. Double click “FPD Defect Folder” icon on the desktop if the folder is not open

3. Select the recipe that contains the files that want to be copied

1. The defect folder is organized by the recipe name. Each folder is a recipe name and contains all the panel data scanned using these recipes

4. Select the files to be copied and copy them to a removable storage device

5. Log in and connect to the VPN on the desktop

6. Copy the files in the flash drive to the Q drive in the corresponding folder

1. Make sure the naming follows the following convention:

• 14XX00XS_STAGE_R#

• 14XX00X: Lot number i.e. 1433001

• S: Substrate – P for PEN, S for Silicon, G for Glass and I for Polyimide

• STAGE: Predefined stage code i.e. GPR, GE, STPR, STE, DPR, DE

• NO RW, NO _ASI_ even if the recipe calls for _ASI_

• R: Rework number. If not reworked it’s 01, 02 etc. If first rework, 11, 12 etc.

• #: Panel number

5. Run LaserMan

1. Click the start menu button and type LaserMan

2. Select the folder of the lot with one click. Do not go deeper into the stage folders

3. Select “Generate Necessary Files” from the menu

4. Select “Panel” and “Optimize by Distance” (it should take a minute or two to finish, based on the file count). If it crashes it’ll let you know. It doesn’t just freeze.

5. Exit the program if not doing anything else

6. Create new map data

1. Select “Setup” from the AOI menu

2. Select any recipe from the list. Select any gen 2 layout for gen 2, 6” wafer layout for 6” wafer

3. Right click on “Program” in the top menu and scroll down to the last option “Detailed” and scroll right to “Map data” and release the mouse button

4. Click “Manual” on the top right

5. Enter the coordinates acquired from the photo and layout engineer.

1. Glass thickness is 1.325 for PEN and 0.7 for glass and PI

2. Cell size is 207 x 207 for FDC39 variants

3. Repeat (Local) and Cell Area (Local) should both have the start coordinates as 0, and end coordinates as the size of the array (X and Y are interchanged).

4. Repeat Location (Global) should point to the top left corner of each array within the panel. To edit these coordinates, right click within the box and select “Edit List”. Left click on any of the line items to select and then right click to “Change/Insert/Delete” any array start point. When completed select “Done editing” at the bottom of the menu.

5. Obtain the alignment mark center locations from the photo engineer and type them in “Alignment targets” section. Be sure to convert the coordinates to “Orbotech coordinates”.

6. Right click on “File” and select “Save as”

7. Enter the new map data file name describing the Mask and thickness info (Such as FDC39E_07mm)

7. Recipe creation for a new layout

1. Select “Setup” from the AOI menu

2. Select a recipe for a layout with the same layer and glass thickness. For instance if a new recipe is needed for FDC39FPI_GPR_07, select any FDC39XPI_GPR_07 variant

3. Click on “Program” from the top menu

4. Click on “Save as” and type in the recipe name and save. This “Save as” process takes a few minutes. It’s normal.

5. Once saving is completed, select the new recipe from the “Panel type list” and click “Load”. Now the new recipe (identical detection parameters and map data) is loaded in the system.

6. Right click on “Program” in the top menu and scroll down to the last option “Detailed” and scroll right to “Map data” and release the mouse button

7. Select the new map file by right clicking on “File” and “Open” and selecting the new layout name.

8. Select “Save” on the program menu on the left again and confirm the “Overwrite”

5. SEPARATE DOCUMENTS

1. Instruction manual for the tool is located by the Sun system

6. ROUTINE MAINTANENCE

Revision

Revision History Name Comment

10/07/2015 Korhan Kaftanoglu Initial Release

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SPECIFICATION FORMAT: | | |EQUIPMENT MANUFACTURER: |ORBOTECH | |EQUIPMENT MODEL: |FPI-7098M | |FDC ASSIGNED TOOL ID NUMBER: |DOD-911NF-04-2-0003 ASU4027514 | |APPLICATION PROGRAM(S) AND REVISION: |AOI Version 7.2j Date: July 4, 2004 | | | | |

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