Background Statement for SEMI Draft Document #4401



Background Statement for SEMI Draft Document #4401

Line Item Revisions to SEMI S1, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Note: The Safety Checklist for this document will be reviewed and voted on at the committee meeting where the document is adjudicated.

Note: Additions are indicated by underline and deletions are indicated by strikethrough.

Dear Colleagues,

This line item ballot is the result of the 5-year review of SEMI S1-0701 by our task force.

SEMI S1, when released in 2001, was a leader in equipment safety labeling, because it created a unified label design that could be used anywhere in the world. Since 2001 the ISO 3864 and ANSI Z535 standards on which S1 is based have been modified to also allow a unified design.

However, the unified design now allowed by ISO and ANSI differs slightly from SEMI S1-0701. S1 now needs to be updated to bring it into compliance with the unified design in the new versions of the ISO and ANSI standards. These and other, additional changes recommended by the task force are described below.

Background source: white papers describing the changes to the ISO and ANSI standards can be found at the following links provided by Clarion Safety Systems:







DISCLAIMERS:

1. The use of these links and white papers does not imply an endorsement by SEMI or the task force of the products or services of Clarion Safety Systems. However, the task force thanks Clarion Safety Systems for its permission to make these links and papers available for those voting on this ballot.

2. While the task force believes that the content of these white papers is accurate, the task force has not independently verified their accuracy.

This ballot consists of eight line items.

Unified Safety Alert Symbol (LI 1)

The new unified safety alert symbol is, in essence, a small version of the General Warning symbol. Line Item 1 adds this new symbol to Figure 1, and updates Figures 2 and 5, as well as section 12.4, to include the new safety alert symbol. Line Item 1 has four parts: A, B, C and D.

Revised Definitions for Signal Words (LI 2)

ANSI Z535 has changed its definitions of the signal words—DANGER, WARNING, and CAUTION. Line Item 2 incorporates these changes into S1. Line Item 2 also makes the minor grammatical change of “which” to “that.”

New Signal Word NOTICE (LI 3)

S1-0701 limited its signal word provisions to hazards that could cause personal injuries. However, S1-0701 advised in its non-binding NOTE 9 that CAUTION without a safety alert symbol may be used with hazards that could cause equipment damage only. ANSI now also allows a new signal word, NOTICE, to be used with hazards that could cause equipment damage only. Line Item 3 describes how NOTICE may be used. Line Item 3 consists of part A, which modifies NOTE 9 from S1-0701; and part B, which adds a new Related Information 2.

Signal Word Translation Table (LI 4)

The ISO and ANSI standards both provide translations of the signal words in “informative” annexes (informative annexes are non-binding sections equivalent to the Related Information sections of a SEMI document). However, in S1-0701, the translations are provided in Appendix 2, which is “normative” (i.e., contains binding information). The only normative reference to Appendix 2 from the main body of S1-0701 is the “lettering style” reference in section 11.1.

Furthermore, ANSI now uses an updated and expanded version of the translation table that was used in Appendix 2 of S1-0701. ISO is preparing to vote on this same table.

Line Item 4 aligns S1 with ISO and ANSI by removing the old table from normative Appendix 2 and replacing it with the new table in informative Related Information 3. Line Item 4 also:

• removes section 11.1 entirely (because it refers to the now nonexistent Appendix 2);

• renumbers section 11.2 to 10.6, plus makes a slight wording change to differentiate the text of the word message from the signal word; and

• renumbers section 11.3 to 10.7.

Line Item 4 consists of parts A, B and C.

Update Information and Symbol in Appendix 1 (LI 5)

Line Item 5 updates the source information in Appendix 1, adds a new source document (ISO 7010) to section 4.3, and updates the reference to ISO 3864 in 4.3. Line Item 5 also introduces an updated symbol, the new ISO 7010 Read Manual symbol, in Table A1-2. The current Read Manual symbol is now marked as an alternate to allow its continued use.

Line Item 5 consists of parts A and B.

Align Definitions with Revised S10 and S2 (LI 6)

After S1-0701 was released, “mishap” was replaced with “harm” in SEMI S10, and the definition for “hazard” was revised in S10 (reference sections 5.1.4 and 5.1.5 of S10-1103). These same changes were then made to SEMI S2 (reference sections 5.2.25 and 5.2.26 of S2-0706E). Line Item 6 updates the definitions of S1 to match the updated definitions in S10 and S2.

Explicitly Recognize Prohibition Symbols (LI 7)

Line Item 7 corrects an omission in section 9.4 by explicitly adding prohibited actions to those things that can be represented by a symbol. Although Table A1-3 in Appendix 1 clearly includes symbols of prohibited actions, they were inadvertently not included in the text of section 9.4 of S1-0701.

Wider Use of Symbol-Only Formats (LI 8)

EXCEPTION 2 to section 7.1 of S1-0701 limits the use of symbol-only formats to “When space limitations exist…for safety labels whose target audience is maintenance or service personnel.” The S1 Revision Task Force believes that today, six years after the release of S1-0701, symbols are widely understood and this limitation is no longer needed. Furthermore, this change updates S1 to align with ANSI Z535.4-2007 and ISO 386402: 2004. Accordingly, Line Item 8 revises section 7 to allow for both one panel (i.e., symbol only) labels and multiple panel labels, and removes EXCEPTION 2.

The ballot will be discussed further at a meeting of the S1 Revision task force during SEMI Standards meetings July 2007 in San Francisco, California. The formal adjudication of this ballot is scheduled for the EHS Committee meeting July 2007 in San Francisco, California. Anyone wishing to participate in the discussions should advise Mike Sherman (mike.sherman@fsi-, 952-361-8140), so that he can ensure that the individual is added to the TF Roster and advised of the teleconference access information and the availability of drafts for review.

(S1 Revision Task Force Leaders)

-Geoff Peckham, Clarion Safety Systems

-Mike Sherman, FSI International

-Ed Karl, Applied Materials

Safety Checklist for SEMI Draft Document #4401

Title: Line Item Revisions to 2781DSEMI S1 SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS

Developing/Revising Body

|Name/Type: |S1 Update (5-year review and revision) Task Force |

|Technical Committee: |EHS |

|Region: |NA |

Leadership

|Position |Last |First |Affiliation |

|Leader |Karl |Ed |Applied Materials |

|Leader |Peckham |Geoff |Clarion Safety Systems |

|Leader |Sherman |Mike |FSI International |

|Author/Editor* |Sherman |Mike |FSI International |

|Checklist Author* |Sherman |Mike |FSI International |

* Only necessary if different from leaders

Documents, Conflicts, and Consideration

Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee

|# and Title |Manner of Consideration |

|ANSI Z535.4-2007 American National Standard |The 4401 task force looked at this updated standard and has created relevant line items to |

|For Product Safety Signs and Labels (to be |align S1 with its revised requirements. |

|published in June/July 2007) | |

|ISO 3864-2 Graphical symbols - Safety colours|ISO 3864 was rewritten and expanded into 3 parts since S1-0701 passed committee; the 4401 |

|and safety signs - Part 2: Design principles |task force looked at ISO 3864-2 and has created line items to align S1 with its revised |

|for product safety labels, First Edition |requirements. |

|2004-10-15 | |

|ISO 7010 Graphical symbols - Safety colours |The task force reviewed this document, which was released after S1-0701 passed committee, |

|and safety signs - Safety signs |and updated Appendix 1 accordingly. |

|used in workplaces and public areas | |

|SEMI S2-0706E |definition for harm and hazard (see background statement for Line Item 6) |

|SEMI S10-1103 |definition for harm and hazard (see background statement for Line Item 6) |

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline

|# and Title |Inconsistency with This Safety Guideline |

|[none known to task force leadership at time |The purpose of 4401 is to align S1 with other documents such as S10 and S2 to resolve |

|of ballot submittal] |inconsistencies such as the noted harm and hazard issues. There are no other inconsistencies|

| |known to the task force leadership at the time of ballot submittal. |

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical

|# and Title |Nature of Conflict with This Safety Guideline |

|[none known to task force leadership at time |The purpose of 4401 is to align S1 with the updated ANSI Z535 and ISO 3864 series of |

|of ballot submittal] |standards; i.e., to resolve known conflicts. The 4401 ballot resolves conflicts, as opposed |

| |to creating them, to our best knowledge. |

| | |

| | |

| | |

Participants and Contributors

|Last |First |Affiliation |

|Karl |Ed |Applied Materials |

|Planting |Bert |ASML |

|Mashiro |Supika |Canon ANELVA |

|Bauman |Mark |Rockwell Automation |

|Ibuka |Shigehito |TEL |

|Yakimow |Byron |Cymer |

|Sklar |Eric |Safety Guru |

|Sherman |Mike |FSI International |

|Reganess |Jerry |Clarion Safety Systems |

|Peckham |Geoff |Clarion Safety Systems |

|Rehder |Alan |UL |

The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees.

SEMI Draft Document #4401

LINE ITEM BALLOT TO: 2781DSEMI S1-0701E, SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS

This safety guideline was technically approved by the Global Environmental Health and Safety Committee and is the direct responsibility of the North American Environmental Health and Safety Committee. Current edition approved by the North American Regional Standards Committee on April 30, 2001. Initially available at May 2001; to be published July 2001. Originally published in 1986; previously published in 1990.

This document replaces S1-90 in its entirety.

E This standard was editorially modified in January 2005 to correct a spelling error. Changes were made to Appendix 2.

Purpose

This guideline provides guidance for the content and format of equipment safety labels and gives examples of symbols to use.

This guideline is intended for use by equipment manufacturers to create safety labels that alert persons to hazards associated with the equipment.

This guideline is intended to provide a unified international semiconductor-industry-specific safety labeling format.

Scope

This guideline is intended to assist in developing safety labels for manufacturing equipment used in the semiconductor industry.

This guideline may also be used for the design of safety signs for the facilities where semiconductor manufacturing equipment is installed.

The guidance provided in this document may also be adapted to help communicate safety information in installation instructions, operation and maintenance manuals, and other similar written communication relating to a product.

This guideline may also be adapted for the design of computerized user interfaces on equipment.

In order to present a more consistent user interface, it is recommended that the use of the words DANGER, WARNING, and CAUTION, in such interfaces be limited to the meanings and uses given for them in this guideline.

This document contains the following sections:

1. Purpose

2. Scope

3. Limitations

4. Referenced Standards

5. Terminology

6. General Provisions

7. Formats

8. Signal Words

9. Symbols

10. Word Messages

11. Lettering

12. Colors

13. Placement

14. Translation

15. Related Documents

Appendix 1 — Safety Symbols

Appendix 2 — Translations of Signal Words

This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this guideline to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Limitations

Various components or assemblies used in semiconductor manufacturing equipment may carry safety labels that are designed and affixed in accordance with other international standards. It is not the intent of this guideline to replace or supersede such labeling requirements.

Some safety label formats and content are dictated by other applicable standards and guidelines or by law (e.g., laser labeling and chemical hazard communication labeling in certain countries of use). It is not the intent of this guideline to replace or supersede such labeling requirements.

New safety labels and safety labels that are significantly redesigned should conform to the latest version of SEMI S1. This guideline is not intended to be applied retroactively.

Referenced Standards

Unless otherwise indicated, all documents cited shall be the latest published versions.

SEMI Standards

SEMI S10 — Safety Guideline for Risk Assessment

ANSI Standards[1]

ANSI Z535.1 — Safety Color Code

ANSI Z535.3 — Criteria for Safety Symbols

ANSI Z535.4 — Product Safety Signs and Labels

ISO Standards[2]

Line Item 5, Part A: Update ISO 3864 title; add new ISO standard.

Text to be added is shown underlined.

ISO 3864 — Safety Colours and Safety Signs, Parts 1, 2 and 3

ISO 7010 — Graphical symbols - Safety colours and safety signs - Safety signs used in workplaces and public areas

IEC Standards[3]

IEC 61310-1 — Safety of Machinery - Indication, Marking and Actuation - Part 1: Requirements for Visual, Auditory and Tactile Signals

Terminology

Line Item 6

Update hazard definition; replace mishap definition with harm definition. Text to be removed is shown struck through; text to be added is shown underlined.

hazard — condition that has the potential to cause harm a condition that is a prerequisite to a mishap.

mishap harm — physical injury or damage to health of people, or damage to equipment, buildings or environment an unplanned event or series of events that results in death, injury, occupational illness, damage to or loss of equipment or property, or environmental damage.

panel — area of a safety label having a distinctive background color which is different from other areas, or which is delineated by a line, border, or margin. See Figures 3 and 4 for examples of panel placement.

safety alert symbol — a specific symbol (see Figure 1) that indicates a potential personal injury hazard.

[pic]

Figure 1

Safety Alert Symbols for Signal Word Panel Use

Line Item 1, Part A

Replace Figure 1 above with Figure 1 below. Text and symbols to be removed are not shown below; text to be added is shown underlined below.

[pic]

(A) for use with DANGER signal word (white triangle, red exclamation mark and red background)

(B) for use with WARNING signal word (black triangle, orange exclamation mark)

(C) for use with CAUTION signal word (black triangle, yellow exclamation mark)

(D) and (E) for use with DANGER, WARNING or CAUTION signal words (yellow background, black border and black exclamation mark. (E) has a yellow border around the black border.)

Figure 1

Safety Alert Symbols for Signal Word Panel Use

safety label — a sign, label, or decal that provides safety information.

signal word — the word that calls attention to the safety label and designates a degree or level of hazard seriousness.

surround shape — a geometric configuration that is placed around a symbol and which conveys additional safety information.

symbol — a graphical representation, either abstract or representational, of a hazard, a consequence of engaging a hazard, or a method to avoid a hazard, or some combination of these ideas.

Some label design standards use the term “pictorial” in the same sense as this guideline uses the term “symbol.”

target audience — the audience to be advised of the hazard.

General Provisions

Safety labels should communicate information about specific hazards. Safety labels should be simple, direct, and understandable by the target audience.

Content — Safety labels should communicate:

the seriousness of the hazard (indicated by the signal word);

the nature of the hazard (e.g., type of hazard) or the probable consequence of engaging the hazard; and

how the hazard can be avoided.

See Figure 2 for examples of how this information can be communicated on a safety label.

[pic]

Figure 2

Examples of How Product Safety Labels Communicate Content

(Note that the order and content of the word message is flexible).

Line Item 1, Part B

Replace Figure 2 above with Figure 2 below. The only difference: the solid triangle portion of the safety alert symbol is yellow in the lower label.

[pic]

Figure 2

Examples of How Product Safety Labels Communicate Content

(Note that the order and content of the word message is flexible).

Identifier — Safety labels should have a unique identifier (e.g., a part number) printed on the label, to facilitate ordering replacement labels from the equipment manufacturer.

If a safety label becomes illegible, the user may want to replace it.

Durability — Safety labels should have a reasonable useful life. Determination of reasonable useful life should take into consideration the expected life of the product and the intended environment of use.

Two factors that may be used for judging useful life are color stability and legibility when viewed at a safe viewing distance. Legibility is affected by letter height.

Formats

Line Item 8: Modify to allow for wider use of symbol-only format. Includes adding Figure “X” and modifying the title of Figure 3.

Text to be removed is shown struck through; text to be added is shown underlined.

Safety labels should consist of one of the following formats. Safety labels should consist of at least three panels: signal word panel, word message panel, and symbol panel. Figure 3 provides examples of some possible horizontal and vertical formats incorporating these panels.

One panel: symbol only with colored surround shape and border (see Figure X).

[pic]

Figure X

Examples of One-Panel Format Options for Product Safety Labels (shown without graphical symbols)

7.1.2 Multiple panels: Signal word panel, one or more symbol panels, and text panel. Figure 3 provides examples of some possible horizontal and vertical formats incorporating multiple panels.

EXCEPTION 1: A symbol panel is not necessary for labels that indicate only potential property damage hazards.

EXCEPTION 2: When space limitations exist, such as under guards or on small parts, for safety labels whose target audience is maintenance or service personnel, symbol-only formats with surround shapes (i.e., no signal word, word message, or symbol panels; see Figures 7, 8, and 9) may be used. In this case, borders around the surround shapes should be used. Alternatively, for the same situations, a safety label may be used that has a signal word panel and a word message panel but does not have a symbol panel.

[pic]

Figure 3

Examples of Multiple Panel Format Options for Product Safety Labels

Multiple Hazard Formats — More than one hazard may be conveyed on a single safety label (see Figure 4 for examples).

[pic]

Figure 4

Examples of Multi-Hazard Safety Label Formats

Signal Words

The signal words for safety labels are DANGER, WARNING, and CAUTION.

Line Item 2: Modify signal word definitions.

Text to be removed is shown struck through; text to be added is shown underlined.

DANGER is the signal word used to indicate an imminently hazardous situation that, if not avoided, will result in death or severe injury. This signal word is to be limited to the most extreme situations.

WARNING is the signal word used to indicate a potentially hazardous situation which that, if not avoided, could result in death or severe injury.

CAUTION is the signal word used to indicate a potentially hazardous situation which that, if not avoided, could result in moderate or minor injury. It may also be used to alert against unsafe practices.

Line Item 3, Part A: Modify NOTE 9 to add NOTICE signal word.

Text to be added is shown underlined.

CAUTION without the safety alert symbol may be used as a signal word to indicate a potentially hazardous situation which, if not avoided, could result in property damage. NOTICE without the safety alert symbol may be used as a signal word to indicate a hazardous situation that, if not avoided, could result in property damage; Related Information 2 contains formatting information for the signal word NOTICE.

SEMI S10 contains examples of ways to categorize severe, moderate, and minor injuries.

The signal word is placed in the signal word panel.

For DANGER, WARNING, and CAUTION signal words, the safety alert symbol (see Figure 1) is located immediately to the left of and on the same level as the signal word (see Figure 5).

[pic]

Figure 5

Signal Word Panels

Line Item 1, Part C

Replace Figure 5 above with Figure 5 below.

[pic]

Figure 5

Signal Word Panels

The safety alert symbol should not be used to alert persons to property-damage-only hazards.

When multiple hazard situations are addressed on one safety label, and the hazards are classified at different levels of seriousness, the signal word corresponding to the greatest hazard level should be used.

Symbols

Symbols are graphic representations chosen to convey specific safety messages.

The symbol panel should contain the safety label’s symbol(s).

More than one symbol panel may be used on a safety label.

See also Section 7.2.

More than one symbol may be used in each symbol panel.

Symbols may be used to clarify or supplement a portion of a safety label’s word message.

In some cases, symbols may replace the word message. See the exception to Section 10.2.

Line Item 7: Modify 9.4 to include prohibition symbols.

Text to be added is shown underlined.

A symbol should represent the nature of the hazard, or the potential consequence of engaging the hazard, or actions to be taken to in order avoid the hazard, or actions that are prohibited in order to avoid the hazard.

Symbols should be compatible with the safety label’s word message.

It is preferable to use the symbols shown in Appendix 1.

For additional information on symbol design, see Annex A of ANSI Z535.3.

Symbols should be shown in their appropriate surround shape as defined in Section 9.10.

When an effective symbol does not exist or cannot be created to illustrate the specific hazard or specific avoidance information, the ISO 3864 general warning symbol should be used with a text message that conveys specific information about the hazard (see Figure 6).

[pic]

Figure 6

Safety Label with General Warning Symbol

Location — Symbols should be located on safety labels in the areas designated in the examples in Figures 2, 3, and 4, or located in a similar manner. If multiple symbols are used on a multi-hazard safety label, the symbols should appear in the same order as the safety information described in the word message.

EXCEPTION: Location of the safety alert symbol is governed by section 8.2.1.

Safety Alert Symbol — The safety alert symbol is composed of an equilateral triangle surrounding an exclamation mark.

See Figures 1 and 5 and Section 12.3.4 for format and color information.

Symbol Surround Shapes — Safety symbols should be shown in their appropriate surround shapes (see Figures 7, 8, and 9).

This is for purposes of international harmonization. The surround shapes have been taken from ISO 3864 and IEC 61310-1.

Hazard Identification Surround Shape (see Figure 7) — A symbol located inside a hazard identification surround shape should be used to indicate a personal injury hazard.

Format and Color — The background color should be yellow. The triangular band should be black. The symbol or pictorial representing the hazard should be black. The border should be yellow; the border is optional if the surrounding background is yellow or white. See Figure 7 for more information.

[pic]

Figure 7

Hazard Identification Symbol Surround Shape

Prohibition Surround Shape (see Figure 8) — A symbol located inside a prohibition surround shape should be used to indicate that an action should not be taken or should be stopped.

Format and Color — The prohibition surround shape should be a circular band with a diagonal bar. The background color should be white. The circular band and diagonal bar should be red. The symbol representing the prohibited action should be black and is preferably shown behind the red slash. The border should be white; the border is optional if the surrounding background is white or yellow. See Figure 8 for more information.

[pic]

Figure 8

Prohibition Symbol Surround Shape

Mandatory Action Surround Shape (see Figure 9) — A symbol located inside a mandatory action surround shape should be used to indicate that an action should be taken to avoid a hazard.

Format and Color — The background color should be blue. The symbol representing the mandatory action should be white. The border should be white; the border is optional if the surrounding background is white. See Figure 9 for more information.

[pic]

Figure 9

Mandatory Action Symbol Surround Shape

Word Message

The word message is placed in the word message panel.

The word message preferably contains a description of the hazard, the consequence of engaging the hazard, and how to avoid the hazard. The ordering of this content in the word message is flexible.

EXCEPTION: Parts or all of the word message may be omitted, depending on such factors as whether the message can be inferred from a symbol, other text messages, user training, or the context in which the safety label is used.

The word message on a safety label should be concise and readily understood.

Messages on the same safety label that warn of different hazards should be formatted, when feasible, to prevent them from visually blending together. Bullets, lines, and extra line spacing are examples of such formatting.

When detailed instructions, precautions, or consequences would require a lengthy message, the message may alternatively refer the reader to another source for additional safety information. Examples of such sources include safety instructions, operation and maintenance manuals, service manuals, operating procedures, and safety bulletins.

Line Item 4, Part A: Modify section 11 to: remove separate section name “Lettering”; remove section 11.1, which references Appendix 2; clarify “lettering” reference in section 11.2; and renumber sections 11.2 and 11.3. Note that sections 12 and following will be renumbered at publication, after this line item passes.

Text to be removed is shown struck through; text to be added is shown underlined.

Lettering

Signal words should be in the lettering style shown in Appendix 2.

[renumber to section 10.6] For languages using the “Roman” alphabet, such as the official languages used in the Americas and in much of the European Union, the lettering of the word message should be a combination of upper- and lowercase sans serif letters. Uppercase only lettering may be used for short messages or for emphasis of individual words.

Preferred Roman sans serif lettering styles include those named Arial, Arial Bold, Folio Medium, Franklin Gothic, Helvetica, Helvetica Bold, and Univers.

[renumber to section 10.7] Lettering should be of a size that enables a person with normal vision, including corrected vision, to read the safety label at a safe viewing distance from the hazard.

Related Information 1 provides an example of a method of calculating minimum letter heights.

The proportions and spacing of individual letters also affect readability.

Colors

Color Specifications — Colors should conform to those colors specified in ISO 3864.

For purposes of reproduction, the closest PANTONE( color match for opaque safety colors is:

Red – PANTONE 485

Orange – PANTONE 152

Yellow – PANTONE 109

Blue – PANTONE 2945

(PANTONE( is a registered trademark of Pantone, Inc.).

Perceived color will be different under colored light (e.g., “yellow room”) conditions. The committee knows of no current technical solution.

Symbol and Surround Shape Color Specifications — See section 9.10 for symbol and surround shape color criteria.

Signal Word Panel — The three signal words should be colored as follows (see Figure 5):

The word DANGER should be in white letters on a red background.

The word WARNING should be in black letters on an orange background.

The word CAUTION should be in black letters on a yellow background.

Line Item 1, Part D: Modify 12.3.4 to allow for new type of safety alert symbol.

Text to be removed is shown struck through; text to be added is shown underlined.

Safety Alert Symbol — There are two options for the color of the safety alert symbol. The solid triangle portion should be the same color as the signal word lettering, and the exclamation mark portion should be the same color as the signal word panel background.

The solid triangle portion should be the same color as the signal word lettering, and the exclamation mark portion should be the same color as the signal word panel background (see Figure 1, examples A, B and C).

12.3.4.2 The solid triangle portion is yellow and contains a black triangular band and black exclamation mark (see Figure 1, examples D and E).

Optional Use of Red — The color red may be used in a symbol to indicate heat or fire.

Placement

Location of Safety Labels — Safety labels should be permanently attached to the equipment and, when possible, located near the hazard.

Safe Viewing Distance — Safety labels should be placed to allow the viewer enough time to:

• be informed by the safety label; and

• have sufficient time to avoid the hazard or take appropriate evasive action to reduce the potential harm from the hazard.

Placement — Safety labels should be placed so that they are legible, non-distracting, and not hazardous in themselves.

Inadvertent Removal, Visual Blockage — Safety labels should not be located in areas where they may be removed by the motion of equipment or rendered ineffective by situational conditions.

Safety labels should not be blocked from view by moveable panels such as doors, windows, and racks where this would limit the effectiveness of the blocked label.

Translation

This guideline is not intended to suggest that safety labels be written in or translated into any particular language.

National laws may require that safety label information be provided in one or more particular languages.

Related Documents

ANSI Standards1

ANSI C95.2 — Radio-Frequency Warning Symbol

ANSI N2.1 — Radiation Symbol

ANSI N12.1 — Fissile Material Symbol

ANSI Z136.1 — Safe Use of Lasers

ANSI Z535.2 — Environmental and Facility Safety Signs

ANSI Z535.5 — Accident Prevention Tags

NEMA Standard[4]

NEMA 77 — Standards for Warning Labels

NFPA Standards[5]

NFPA 70 — National Electrical Code

NFPA 178 — Standard Symbols for Fire Fighting Operations

NIST Documents[6]

NBSIR 80-2003 — Workplace Safety Symbols

NBSIR 80-2088 — The Assessment of Safety Symbol Understandability by Different Testing Methods

NBSIR 82-2485 — Symbols for Industrial Safety

United States of America Government Document[7]

21 CFR Part 1040 — Performance Standards for Light-Emitting Products

IEC Standards[8]

IEC 60825-1 — Safety of Laser Products - Part 1: Equipment Classification, Requirements and User's Guide

ISO Standards[9]

ISO 9186 — Comprehension Testing of Graphical Symbols

Line Item 5, Part B: Modify “Source” information; add new Read Manual symbol in Table A1-2; mark existing Read Manual symbol as alternate.

Text to be removed is shown struck through; text to be added is shown underlined.

APPENDIX 1

SAFETY SYMBOLS

NOTE: The material in this appendix is an official part of SEMI S1 and was approved by full letter ballot procedures on April 30, 2001 by the North American Regional Standards Committee.

This appendix illustrates symbols used on safety labels for hazards commonly found in the semiconductor manufacturing industry. Additional symbols may need to be developed for other hazards (see ANSI Z535.3-1998 Informative Annex A for an example of symbol development guidelines).

To determine what symbol should be used on a safety label, it is first necessary to determine what message is to be communicated. Symbols may enhance a safety label’s meaning and may be useful to communicate across many languages.

When appropriate, the following symbols should be used.

NOTE A1-1: Some symbols (e.g., laser, biohazard, and radiation) are required by law or regulation in some jurisictions.

Table A1-1 Hazard Identification Symbols

|# |Referent |Source |Symbol |Description |

|1 |Flammable Material |IEC 61310 |[pic] |Flames |

| | |ISO 7010 | | |

|2 |Explosive Material, |IEC 61310 |[pic] |Object exploding |

| |Explosion Hazard |ISO 7010 | | |

|3 |Danger: Electricity, |IEC 61310, ISO 3864 |[pic] |Lightning bolt |

| |Electrical Hazard |ISO 7010 | | |

|4 |Corrosive Material, |IEC 61310 |[pic] |Test tube, hand, drops |

| |Corrosion |ISO 7010 | | |

|5 |Toxic Material, |IEC 61310 |[pic] |Skull and crossbones |

| |Poison |ISO 7010 | | |

|6 |Slip Hazard |ANSI Z535.3 |[pic] |Person falling on surface |

|7 |Trip Hazard |ANSI Z535.3 |[pic] |Person tripping over object |

|8 |Drop, |IEC 61310 |[pic] |Person falling |

| |Fall Hazard |ISO 7010 | | |

|9 |Lifting Hazard, | |[pic] |Person bent over weight, strain flare above back |

| |Heavy Object | | | |

|10 |Tipover | |[pic] |Person with object tipping over and arrow |

|11 |Entanglement Hazard |ANSI Z535.3 |[pic] |Hand in gears |

| |(hand in gears) | | |Note: other body parts or orientations may be |

| | | | |substituted as necessary |

|12 |Pinch point |ANSI Z535.4 |[pic] |Hand in rollers |

| |(hand in rollers) | | |Note: other body parts or orientations may be |

| | | | |substituted as necessary |

|13 |Cut/Sever |ANSI Z535.3 |[pic] |Hand and sharp object |

| |(hand and sharp object) | | |Note: other body parts or orientations may be |

| | | | |substituted as necessary |

|14 |Crush Hazard | |[pic] |Hand between two surfaces, arrow |

| | | | |Note: other body parts or orientations may be |

| | | | |substituted as necessary |

|15 |Heat, |ISO 3864, ISO 7000 |[pic] |Heat waves |

| |Hot Surface |ISO 7010 | | |

|16 |Cold |ISO 7010 |[pic] |Snow flake |

|17 |Strong Magnetic Field |ISO 7010 |[pic] |Horseshoe magnet |

|18 |Radioactive Material, |IEC 61310 |[pic] |Abstract three blades |

| |Radiation Hazard |ISO 7010 | | |

|19 |Laser Beam |IEC 60825-1 |[pic] |Radiating sunburst, line |

|20 |Biological Risk, |IEC 61310 |[pic] |Abstraction |

| |Biohazard |ISO 7010 | | |

|21 |Non-Ionizing Radiation, |IEC 61310 |[pic] |Abstract radiation transmitter |

| |Radio Frequency |ISO 7010 | | |

|22 |UV Light Hazard | |[pic] |The letters “UV” inside a sunburst |

|23 |Inhalation Hazard (e.g., | |[pic] |Human figure breathing in particles |

| |toxic gas, asphyxiation | | | |

| |hazard) | | | |

|24 |General Warning |ISO 3864 |[pic] |Exclamation point |

| |(should be supplemented | | |(See Figure 6 for an example of a safety label |

| |with words) | | |using the General Warning symbol) |

Table A1-2 Mandatory Action Symbols

|# |Referent |Source |Symbol |Description |

|1 |Wear Eye Protection |IEC 61310 |[pic] |Head with eyeglasses |

|2 |Wear Ear Protection |IEC 61310 |[pic] |Head with ear protection |

|3 |Wear Head Protection |IEC 61310 |[pic] |Head with hard hat |

|4 |Wear Respiratory Protection|IEC 61310 |[pic] |Head with respirator |

|5 |Wear Safety Boots |IEC 61310 |[pic] |Shoes |

| | | | |(one with metal plate shown) |

|6 |Wear Safety Gloves |IEC 61310 |[pic] |Two gloves |

|7 |Lift with Mechanical | |[pic] |Mechanical jack supporting object |

| |Assistance | | | |

|8 |Lift with Two Persons | |[pic] |Two persons grasping object |

|9 |Read Manual | |[pic] |Person reading open book |

| |(alternate) | | | |

|9 |Read Manual |ISO 7010 |[pic] |Person reading open book |

|10 |Lock Out in De-Energized | |[pic] |ON and OFF symbols next to locked clasp |

| |State | | | |

Table A1-3 Prohibition Symbols

|# |Referent |Source |Symbol |Description |

|1 |No Smoking |ANSI Z535.3 |[pic] |Lighted cigarette |

|2 |No Open Flame |IEC 61310 |[pic] |Lighted match |

| | |ISO 7010 | | |

|3 |No Access For Unauthorized |IEC 61310 |[pic] |Person shouting with outstretched hand |

| |Persons | | | |

|4 |No Portable Transmitters | |[pic] |Wireless telephone |

|5 |No Pacemakers | |[pic] |Ball and line attached to heart |

|6 |General Prohibited Action |ISO 3864 |[pic] |Prohibition surround shape |

| |(should be supplemented |ISO 7010 | | |

| |with words) | | | |

Line Item 4, Part B: removed entire Appendix 2, including table.

Text to be removed is shown struck through.

APPENDIX 2

TRANSLATIONS OF SIGNAL WORDS

NOTE: The material in this appendix is an official part of SEMI S1 and was approved by full letter ballot procedures on April 30, 2001 by the North American Regional Standards Committee.

Translation of the signal words and word message are optional considerations. If the signal word of a safety label is to be translated, the following translations should be used.

[pic]

NOTICE:

Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the safety guideline.

SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for any particular application. The determination of the suitability of the guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These guidelines are subject to change without notice.

The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their own responsibility.

RELATED INFORMATION 1

MINIMUM LETTER HEIGHT CALCULATIONS

NOTE: This related information is not an official part of SEMI S1 and is not intended to modify or supersede the official guideline. It has been derived from the informative Annex B of ANSI Z535.4-1998. Publication is authorized by vote of the responsible committee. Determination of the suitability of this material is solely the responsibility of the user.

R1-1 A common concern when designing safety labels is determining the minimum letter height of text. This Related Information describes one method that may be used to determine a minimum letter height.

Table R1-1 Examples of Word Message Uppercase Letter Heights at Various Viewing Distances

|Viewing Distance |Minimum Letter Height for FAVORABLE|Recommended Letter Height for |Recommended Letter Height for |

| |Reading Conditions |FAVORABLE Reading Conditions |UNFAVORABLE Reading Conditions |

|300 mm (12 in.) or less* |2 mm (0.08 in) |2 mm (0.08 in) |2 mm (0.08 in) |

|600 mm (24 in.) |2.5 mm (0.10 in) |4 mm (0.16 in) |4 mm (0.16 in) |

|900 mm (35 in.) |3 mm (0.12 in) |4.75 mm (0.19 in) |6 mm (0.24 in) |

|1.2 m (47 in.) |3.5 mm (0.14 in) |5.5 mm (0.22 in) |8 mm (0.31 in) |

|1.5 m (59 in.) |4 mm (0.16 in) |6.25 mm (0.25 in) |10 mm (0.39 in) |

|1.8 m (71 in.) |4.5 mm (0.18 in) |7 mm (0.28 in) |12 mm (0.47 in) |

|2.1 m (83 in.) |5 mm (0.20 in) |7.75 mm (0.31 in) |14 mm (0.55 in) |

|2.4 m (94 in.) |5.5 mm (0.22 in) |8.5 mm (0.33 in) |16 mm (0.63 in) |

* 2 mm (0.079 in.) is the suggested minimum type size for use on safety labels.

Calculations for Recommended Letter Heights (in mm) for FAVORABLE Reading Conditions:

600 mm or less: (viewing distance in mm) / 150

>600 mm to 6 m: [(viewing distance in mm - 600) x .0025] + 4

Calculation for Recommended Letter Heights for UNFAVORABLE Reading Conditions (all distances):

(viewing distance) / 150

NOTICE:

Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the safety guideline.

SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for any particular application. The determination of the suitability of the guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These guidelines are subject to change without notice.

The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their own responsibility.

Line Item 3, Part B: Add new Related Information 2 regarding formatting of NOTICE signal word.

Text to be added is shown underlined.

RELATED INFORMATION 2

FORMATTING OF “NOTICE” SIGNAL WORD

NOTE: This related information is not an official part of SEMI S1 and is not intended to modify or supersede the official guideline. It has been derived from ANSI Z535.4-2007. Publication is authorized by vote of the responsible committee. Determination of the suitability of this material is solely the responsibility of the user.

R2-1 The word NOTICE should be in white letters on a blue background (see Figure R2-1).

[pic]

Figure R2-1

Example of Formatted NOTICE Signal Word

Line Item 4, Part C: Add new Related Information 3 regarding translation of signal words.

Text to be added is shown underlined.

RELATED INFORMATION 3

TRANSLATION OF SIGNAL WORDS

NOTE: This related information is not an official part of SEMI S1 and is not intended to modify or supersede the official guideline. It has been derived from Annex D of ANSI Z535.4-2007. Publication is authorized by vote of the responsible committee. Determination of the suitability of this material is solely the responsibility of the user.

R3-1 Translation of the signal words and word message are optional considerations. If the signal word of a safety label is to be translated, the following translations may be used (see Table R3-1).

Table R3-1 Translation of Signal Words

[pic]

-----------------------

[1] American National Standards Institute, 11 West 42nd Street, New York, New York 10036, USA,

[2] International Organization for Standardization, C.P.56, CH-1211 Geneva 20, Switzerland,

[3] International Electrotechnical Commission, 1 rue de Varembe, Geneva, Switzerland,

[4] National Electrical Manufacturers Association, 2101 L Street, N.W., #300, Washington, D.C. 20037, USA,

[5] National Fire Protection Association, Batterymarch Park, Quincy, MA 02269, USA,

[6] U.S. Department of Commerce, National Institute of Standards and Technology, Center for Building Technology, Washington, D.C., USA,

[7] U.S. Government Printing Office, Washington, D.C., USA,

[8] International Electrotechnical Commission, 1 rue de Varembe, Geneva, Switzerland,

[9] International Organization for Standardization, C.P.56, CH-1211 Geneva 20, Switzerland,

-----------------------

DRAFT

Document Number: 4401

Date: 5/29/2007

LETTER (YELLOW) BALLOT

Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l

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