Modified sheet resistance and specific contact resistance of Ni-, Pt ...

SiC 2 [11]. The Pt/3C-SiC interface at 500–600 °C has comprised Pt 2 Si and clusters of carbon with increasing width of the reacted region at 700–900 °C [10]. It has been proposed that a layered structure of Ni/Pt or Pt/Ni may form contacts to n-type 3C-SiC with a combination of low contact resistance and high thermal stability [2 ]. ................
................