SiC-Based Gas Sensors - NASA
SiC-based capacitors using platinum (Pt) as the gas sensitive metal have detected hydrogen concentrations as low as 2.5 ppm and have operated at temperatures as high as 800°C (2). The capacitors respond to hydrocarbons such as methane, ethane, and propane, as well as NO x. Response times of less than 100 ms have been obtained (3-4). ................
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