SiC MEMS Pressure Sensors: Technology, Applications and Markets
All in all SiC has come a very long way as a foundation material for MEMS. Considering that SiC research efforts were roughly 10 years behind Si MEMS, it is a reasonable claim that SiC microfabrication technology is ready to impact applications and markets in the same way as Si MEMS did 10 years ago. SiC MEMS Applications ................
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