EE 520 - Purdue University
A. Crystal Growth 3.0 B. Chemical Vapor Deposition - Vapor Phase Epitaxy - Molecular Beam Epitaxy 6.0 C. Silicon in Insulators 3.0 D. Doping Profiles in Epi-layers 3.0 2. Dielectric and Polysilicon Film Deposition A. Deposition Processes and Reactor Design 2.0 B. Polysilicon and Silicon Dioxide 2.0 3. ................
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