The 8th Annual IEEE International Conference ... - proceedings

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2013)

Suzhou, China 7 ? 10 April 2013

Pages 1-614

IEEE Catalog Number: CFP13NME-POD

ISBN:

978-1-4673-6350-1

1/2

TABLE OF CONTENTS

AN ELECTROCHEMICAL MICROSENSOR BASED ON MOLYBDOPHOSPHATE COMPLEX FOR FAST DETERMINATION OF TOTAL PHOSPHORUS IN WATER ................................................................. 41

Y. Bai, J. Tong, C. Bian, S. Xia

DEVELOPMENT OF A PIEZOELECTRIC POLYVINYLIDENE FLUORIDE POLYMER-BASED SENSOR PATCH FOR SIMULTANEOUS HEARTBEAT AND RESPIRATION MONITORING .......................... 45

Y. Chiu, W. Lin, H. Wang, S. Huang, M. Wu

DYNAMIC CELL ATTACHMENT OF HEPG2 IN A MICROCHANNEL ................................................................. 52

L. Yang, C. Lu, J. Liang, H. Han

MANIPULATION OF DNA ORIGAMI NANOTUBES IN LIQUID USING A PROGRAMMABLE TAPPING MODE AFM...................................................................................................................................................... 56

L. Li, X. Tian, Z. Dong, L. Liu, O. Tabata, W. Li

DYNAMIC BEHAVIORS OF MICRODROPLETS IN CONVERGENT MICROCHANNELS UNDER THE EFFECT OF DIELECTROPHORESIS.................................................................................................... 60

Y. Yan, D. Guo, S. Wen

THEORETICAL INVESTIGATION OF QUASIPARTICLE BAND STRUCTURES AND OPTICAL SPECTRA OF LARGE-DIAMETER SEMICONDUCTING SINGLE-WALLED CARBON NANOTUBES ...................................................................................................................................................................... 64

Y. Xia, J. Mu, X. Leng, Y. Ma, M. Zhao, X. Liu, J. Fang

FABRICATION OF MEMBRANE-TYPED METAL MOULD WITH MICROSTRUCTURES AND APPLICATION FOR ROLLER IMPRINTING .............................................................................................................. 68

Y. Tang, Y. Lin, J. Yang, M. Shiao

HIGH PERFORMANCE OXYGEN SENSOR UTILIZING ULTRAVIOLET IRRADIATION ASSISTED ZNO NANORODS UNDER LOW OPERATION TEMPERATURE ........................................................ 72

C. Chou, Y. Wu, C. Lin

A MICRO ELECTROCHEMICAL SENSOR WITH POROUS COPPER-CLUSTERS FOR TOTAL NITROGEN DETERMINATION IN FRESHWATERS ................................................................................................. 76

Y. Li, J. Sun, C. Bian, J. Tong, S. Xia

MICROFLUIDIC DEVICE FOR SUPER-FAST EVALUATION OF MEMBRANE PROTEIN CRYSTALLIZATION ........................................................................................................................................................ 84

H. Wu, T. Basta, M. Morphew, D. Rees, M. Stowell, Y. Lee

SOL-GEL FIBER-OPTIC ABSORBANCE SENSOR FOR GROUNDWATER CONTAMINANTS......................... 88

G. Slaughter, Y. Xin

A MATERIAL AND SURFACE MORPHOLOGY INDEPENDENT MICRO ENVIRONMENT "NICHE" FOR TISSUE ENGINEERING........................................................................................................................ 92

C. Li, G. Wang

SYNTHESIS OF ANTIBACTERIAL TIO2/PLGA COMPOSITE BIOFILMS............................................................ 98

J. Wu, C. Li, C. Tsai, G. Wang

MEASUREMENT OF INTERNAL TEMPERATURE, FLOW AND PRESSURE IN MICROMETHANOL-REFORMER USING MULTIFUNCTION MICRO-SENSORS.......................................................... 104

C. Lee, C. Shen, Y. Chang, F. Liu

INTEGRATED LENSES IN POLYSTYRENE MICROFLUIDIC DEVICES ............................................................ 108

Y. Fan, H. Li, I. Foulds

GRAPHENE FILMS SYNTHESIZED ON ELECTROPLATED CU BY CHEMICAL VAPOR DEPOSITION .................................................................................................................................................................... 112

W. Wang, C. Liang, T. Li, H. Yang, N. Lu, Y. Wang

OPTIMIZATION OF SILICON NANOWIRE BASED FIELD-EFFECT PH SENSOR WITH BACK GATE CONTROL............................................................................................................................................................. 116

A. Gao, P. Dai, N. Lu, T. Li, Y. Wang

SIMULATION AND DESIGN OF MICRO PRESSURE SENSORS APPLIED TO MEASURE THE INTRACRANIAL PRESSURE ........................................................................................................................................ 120

P. Bo, Z. Zhang, T. Ren

MECHANICAL CHARACTERIZATION OF NANOWIRES BY PLANAR VIBRATION SENSOR..................... 124

L. Zhang, J. Lu, H. Takagi, R. Maeda

AN ENERGY HARVESTING DEVICE MANUFACTURED USING THE COMMERCIAL 0.18 ?M CMOS PROCESS.............................................................................................................................................................. 128

C. Dai, M. Yang, S. Peng

WEARABLE SKIN SENSOR USING PROGRAMMABLE INTERLOCKING OF NANOFIBERS....................... 132

K. Suh, N. Jeon, C. Pang

STUDY ON TRAPPING TWO PARTICLES WITH DIELECTROPHORETIC MICROFLUIDIC CHIP ................................................................................................................................................................................... 136

L. Chen, H. Cui, S. Li

DUAL FACED SERS NANOPARTICLES EQUIPPED WITH TRI-FUNCTIONS FOR TARGET DRUG DELIVERING INTO SINGLE CELL ................................................................................................................ 141

H. Hsieh, F. Tseng

PRINT-TO-PRINT: A FACILE FLEXIBLE MULTI-OBJECT PATTERNING PROCESS USING SUPERHYDROPHOBIC FILMS .................................................................................................................................... 145

S. Xing, S. Zhao, T. Pan

MEASUREMENT METHOD OF LIGHT TRANSMITTANCE OF LAYERED METALDIELECTRIC METAMATERIAL ................................................................................................................................. 151

A. Isozaki, T. Kan, K. Matsumoto, I. Shimoyama

INVESTIGATIONS OF SILICON WAFER BONDING USING THIN AL AND SN FILMS FOR HETEROGENEOUS INTEGRATION ........................................................................................................................... 155

Z. Zhu, S. Wang, Y. Xu, G. Wang, Y. Pi, P. Wang, Y. Zhu, X. Sun, M. Yu, J. Chen, M. Miao, Y. Jin

FABRICATION OF TUNABLE WETTING PDMS MEMBRANE BY NANOSTRUCTURING AND PLASMA TREATMENT.................................................................................................................................................. 159

X. Zhang, S. Chu, N. Peter, H. Zhang

PIEZOELECTRIC MEMS DEVICES AND ITS APPLICATION AS BIO-CHEMICAL SENSORS ...................... 163

J. Lu, T. Sagawa, L. Zhang, H. Takagi, D. Wang, T. Itoh, R. Maeda

A NEW MICROPUMP USING AMPLIFIED DEFORMATION OF RESILIENT MEMBRANES......................... 167

C. Liu, G. Lee

A NEW CARBON NANOTUBE-BASED HOT-FILM SENSOR ASSEMBLED BY OPTICALLYINDUCED DIELECTROPHORESIS.............................................................................................................................. 171

M. Hsu, G. Lee

LOW-COST RAPID PROTOTYPING OF FLEXIBLE PLASTIC PAPER BASED MICROFLUIDIC DEVICES ........................................................................................................................................................................... 175

Y. Fan, H. Li, Y. Yi, I. Foulds

MICRO THERMAL FLOW SENSORS/SYSTEMS ON FLEXIBLE PCB AND EXTENSIVE APPLICATIONS ............................................................................................................................................................... 179

R. Zhu, R. Que, Z. Cao

NANOTEXTURED CHITOSAN SURFACES FOR STUDYING CELL BEHAVIORS............................................ 183

C. Yang, C. Sung, J. Yeh

SURFACE TENSION-INDUCED HIGH ASPECT-RATIO PDMS MICROPILLARS WITH CONCAVE AND CONVEX LENS TIPS ........................................................................................................................ 187

H. Li, Y. Fan, Y. Yi, I. Foulds

A COMPARISON STUDY ON HYDROGEN SENSING PERFORMANCE OF PT/MOO3 NANOPLATELETS COATED WITH A THIN LAYER OF TA2O5 OR LA2O3 ........................................................ 191

J. Yu, Y. Liu, F. Cai, M. Shafiei, G. Chen, N. Motta, W. Wlodarski, K. Kalantar-Zadeh, P. Lai

THE STUDY OF THE ENHANCEMENT OF MICRO-VIBRATION-INDUCED HARVESTER BASED ON VAPOR IMPACTING ................................................................................................................................. 195

J. Hsieh, J. Lin, S. Shen, D. Lin

A TWO-DIMENSIONAL SILICON-ON-GLASS ACTUATOR WITH DISPENSED POLYMER MICROLENS .................................................................................................................................................................... 199

P. Li, L. Pan, H. Zappe

CHARACTERIZATION OF FLUID RESISTANCE IN NANOSTRUCTURED TIO2 (NST) FILM ....................... 203

N. Li, J. Chen

INORGANIC ELECTRET WITH ENHANCED CHARGE STABILITY FOR ENERGY HARVESTING .................................................................................................................................................................. 207

F. Wang, O. Hansen

SPECIAL PROPERTIES OF NEW TYPE CARBON-COPPER CORE-SHELL NANOPARTICLES COMPOSITE MATERIAL FABRICATED USING BIOMASS AS TEMPLATE ..................................................... 213

K. Lian, Y. Qi, Q. Wu, X. Wang, W. Li

SYNTHESIS OF SCALABLE MICRODROPLETS WITH FLUID INSTABILITY OF SHEARING FLOW IN MICROFLUIDICS.......................................................................................................................................... 217

X. Ding, J. Yang, Z. Ma, D. Liu, W. Wang, J. Ye, I. Wong, M. Barnes

DESIGN AND IMPLEMENTATION OF AN ON-CHIP POLYMER MICRO BALL BEARING........................... 221

C. Lee, Y. Huang, W. Hsiao, W. Fang

STUDY OF POLYMERIC MEMS MICRO-PUMP ACTUATED BY PZT BIMORPH............................................ 225

Y. Luo, X. Yin, X. Wang, Z. Zhang

MONITORING THE DISEASE ACTIVITY VIA THEANTIBODY-ANTIGEN RECOGNITION IN PAPER................................................................................................................................................................................ 229

H. Wang, C. Tsai, C. Tang, P. Li, J. Leou, Y. Tang, H. Hsieh, H. Wu, C. Cheng

IN-LINE TESTING OF BLIND TSVS FOR 3D IC INTEGRATION AND M/NEMS PACKAGING...................... 233

Y. Xu, G. Wang, X. Sun, R. Fang, M. Miao, Y. Jin

FABRICATION OF SILICON NANOPILLARS ARRAY FOR DEVELOPING PCS SENSOR.............................. 237

M. Huang, C. Yang, C. Su, M. Shiao

SN-RICH AU-SN HERMETIC PACKAGING AT WAFER LEVEL AND ITS APPLICATIONS IN SPR SENSOR..................................................................................................................................................................... 244

X. Mao, Z. Fang, Z. Zhang, J. Yang, Z. Qi, F. Yang

A MICROMACHINED MONOLITHIC 3 AXIS ACCELEROMETER BASED ON CONVECTION HEAT TRANSFER ........................................................................................................................................................... 248

L. Jiang, Y. Cai, H. Liu, Y. Zhao

FOCUSING REFLECTOR AND LENS WITH NON-PERIODIC PHASE-MATCHED SUBWAVELENGTH HIGH CONTRAST GRATING ................................................................................................. 252

Q. Yu, C. Zhang, H. Zhu, M. Zhang, Y. Wang

DESIGN OF LC-TYPE PASSIVE WIRELESS MULTI-PARAMETER SENSOR.................................................... 256

C. Zhang, J. Huang, Q. Huang

SIMULATION OF THRESHOLD VOLTAGE ADJUSTMENT BY B+ IMPLANTATION FOR PMOS-RADFET APPLICATION ................................................................................................................................... 262

S. Wang, P. Liu, J. Zhang

NOVEL FLEXIBLE ROOM TEMPERATURE NO2 GAS SENSOR BASED ON POLYPYRROLE COATED SNO2 NANOPARTICLES .............................................................................................................................. 266

X. Chen, D. Li, S. Liang, X. Li, S. Zhan, M. Liu

FABRICATION OF AN AMMONIA MICROSENSOR BASED ON ZINC OXIDE ................................................. 270

M. Yang, C. Dai

STUDY OF GENE TRANSFECTION ENHANCEMENT AND PARAMETERS OPTIMIZATION USING MICROFLUIDIC ELECTROPORATION CHIP ............................................................................................ 274

Y. Chung, W. Liao, Y. Huang, C. Wu, C. Tsai

MICROMACHINED CATALYTIC COMBUSTION HYDROGEN GAS SENSOR ................................................. 282

X. Liu, H. Dong, S. Xia

SIMULATION ON HEAT TRANSFER OF THE LIGHT SWITCHABLE MICROELECTRODE ARRAY FOR RETINAL PROSTHESIS......................................................................................................................... 286

T. Wang, X. Zhang, Z. Li

CNTS GATED NANOFLUIDIC SYSTEM FOR SINGLE BACTERIUM DETECTION BY GNPSBASED REDOX SIGNAL AMPLIFICATION .............................................................................................................. 290

P. Wen, J. Wu, H. Chang, F. Tseng

A X-BAND SWITCHED-LINE 5-BIT PHASE SHIFTER WITH RF MEMS MULTITHROW SWITCHES........................................................................................................................................................................ 296

Y. Du, J. Bao, Z. He, J. Jiang

BEND WAVEGUIDE WITH BROAD BANDWIDTH AND HIGH TRANSMISSION EFFICIENCY BASED ON AIR-HOLE PHOTONIC CRYSTAL ......................................................................................................... 300

X. Ren, L. Lin

HYBRID LITHOGRAPHY SYSTEM FOR MEMS/NEMS.......................................................................................... 304

L. Chen, D. Pu, J. Hu, Y. Ye, P. Zhu

OPTIMIZED CAPILLARY BASED MICROARRAY USED FOR DNA ANALYSIS............................................... 308

H. Chen, L. Ge, Z. Zheng, X. Qu, X. Lan

A SYMMETRICAL HYPERBOLIC FORMATTED MICROCHIP FOR RAPID OPTIMIZATION OF ELECTROPORATION.............................................................................................................................................. 312

M. Wu, D. Zhao, H. Yan, Z. Liang, Z. Li

SLIDING MODE CONTROL WITH ADAPTIVE FEEDFORWARD COMPENSATOR FOR ULTRA-PRECISION ACTIVE VIBRATION ISOLATION ........................................................................................ 316

H. Pu, W. Jia, X. Chen

ULTRASENSITIVE MASS DETECTION USING DUAL-MICROCANTILEVERS COUPLED BY CRUCIFORM OVERHANG............................................................................................................................................ 320

R. Zhang, G. Cai, Z. Wang, L. Zhao, W. Wu

FABRICATION AND MORPHOLOGICAL CONTROL OF ELECTROSPUN ETHYL CELLULOSE NANOFIBERS.......................................................................................................................................... 324

X. Wang, G. He, H. Liu, G. Zheng, D. Sun

TISSUE MORPHOLOGY CONTROLLED BY MICROPATTERNING AND SELF-ASSEMBLY OF VASCULAR MESENCHYMAL CELLS ........................................................................................................................ 328

T. Chen, L. Pan, X. Zhu, C. Ho

IN-SITU MEASUREMENT OF ION ANGULAR DISTRIBUTION IN BULK TITANIUM DRIE FOR MODELING THE ETCH PROFILE ..................................................................................................................... 332

J. Hu, S. He, Y. Zhang, J. Chen

A HIGH SENSITIVITY MICROMACHINED ACCELEROMETER WITH AN ENHANCED INERTIAL MASS SOI MEMS PROCESS ..................................................................................................................... 336

J. Xie, M. Song, W. Yuan

FABRICATION AND THERMAL STABILITY CHARACTERIZATION OF RU ELECTRODE USED FOR HIGH POWER CONTACT RF MEMS SWITCH.................................................................................... 340

H. Zhang, Z. Li

A MICROFLUIDIC SYSTEM ENABLING CONTINUOUS CHARACTERIZATION OF SINGLECELL SPECIFIC MEMBRANE CAPACITANCE AND CYTOPLASM CONDUCTIVITY.................................... 344

Y. Zhao, D. Chen, Y. Luo, B. Deng, S. Huang, T. Chiu, M. Wu, R. Long, J. Wang, J. Chen

A SI-GLASS BASED PRESSURE SENSOR WITH A SINGLE PIEZORESISTIVE ELEMENT FOR HARSH ENVIRONMENT APPLICATIONS ................................................................................................................ 348

H. Zhang, H. Xu, Y. Li, Z. Song, H. San, Y. Yu

ANNEALING EFFECT ON THE STABILITY OF PLATINUM THIN FILMS COVERED BY SIO2 OR SINX LAYER............................................................................................................................................................... 352

L. Xiao, Z. Zhao, L. Du, S. Wu, Q. Liu

SIMULATION OF IMPINGEMENT AND SPREADING OF MICRO-DROPLET ON NONHOMOGENEOUS SOLID SURFACE............................................................................................................................ 356

C. Lim, Y. Lam

CONTROL OF SWIMMING IN CRUCIAN CARP: STIMULATION OF THE BRAIN USING AN IMPLANTABLE WIRE ELECTRODE.......................................................................................................................... 360

C. Zhang, J. Liu, H. Tian, X. Kang, Y. Rui, B. Yang, H. Zhu, C. Yang

FREESTANDING WHISPERING-GALLERY MODE MICRODISK RESONATOR.............................................. 364

Z. Shi, S. He, H. Zhu, M. Zhang, Y. Wang

PHOTOCATALYTIC MICROREACTORS FOR WATER PURIFICATION: SELECTIVE CONTROL OF OXIDATION PATHWAYS .................................................................................................................. 368

N. Wang, N. Chan, C. To, F. Tan, X. Zhang

SURFACE PROPERTY STUDY OF DIFFERENT PATTERNING SAPPHIRE STRUCTURES BY ICP-RIE.............................................................................................................................................................................. 372

C. Chang, M. Shiao, D. Chiang, M. Huang, C. Yang, W. Hsueh

ELECTROSPUN NICKEL OXIDE NANOFIBERS FOR GAS SENSOR APPLICATION ...................................... 377

H. Liu, X. Wang, G. He, Y. Lin, J. Wei, J. Zheng, G. Zheng, D. Sun

INFLUENCE OF SUBSTRATE SURFACE ROUGHNESS ON THE PROPERTIES OF A PLANARTYPE CO2 SENSOR USING EVAPORATED LI3PO4 FILM....................................................................................... 385

H. Wang, P. Li, G. Sun, Z. Jiang

OPTIMIZATION OF THE MICRO CHANNEL LADDER SHAPE HEAT SINK .................................................... 389

C. Kang, S. Tai, S. Chen, D. Lin

MULTI-CHANNEL MICROELECTRODE ARRAY FOR CORTICAL RECORDING AND STIMULATION: FABRICATION AND MODIFICATION ........................................................................................ 395

S. Chen, W. Pei, Q. Gui, Y. Chen, S. Zhao, H. Chen

LOW TEMPERATURE SYNTHESIS OF CUBIC BATIO3 NANOPARTICLES...................................................... 399

X. Wu, Z. Chen, Z. Cui

TUNNELING EFFECT ON ENHANCED OLED PERFORMANCE USING AL2O3 BUFFER LAYER ............................................................................................................................................................................... 407

L. Zhou, W. Su, Z. Cui

EXPERIMENTAL AND THEORETICAL STUDY OF HYDRODYNAMIC CELL LYSING OF CANCER CELLS IN A HIGH-THROUGHPUT CIRCULAR MULTI-CHANNEL MICROFILTRATION DEVICE ..................................................................................................................................... 412

W. Ma, D. Liu, H. Shagoshtasbi, A. Shukla, E. Nugroho, Y. Zohar, Y. Lee

FUNCTIONAL SU-8-PET COMPOSITE MICROCHIP INCLUDING AU MICRODOT ARRAY FABRICATED BY LOW TEMPERATURE POLYMER BONDING ......................................................................... 418

R. Yamamoto, K. Sueyoshi, K. Otsuka

FABRICATION OF SILICON PIEZORESISTIVE PRESSURE SENSOR USING A RELIABLE WET ETCHING PROCESS............................................................................................................................................. 424

H. Xu, H. Zhang, Z. Deng, H. San, Y. Yu

DEVELOPMENT OF CLUSTER ION SOURCE BASED ON MODULATED PULSE POWER MAGNETRON SPUTTERING TECHNIQUE............................................................................................................... 428

C. Zhang, H. Tsunoyama, H. Akatsuka, H. Sekiya, T. Nagase, A. Nakajima

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