PDF Lecture 29: Productivity and process yield - NPTEL
Figure 1: The three yield points and their relation to IC process ow. Fab yield is related to the individual station yields in the fab. Sort yield is re-lated to e-test and die yield is after packaging. Adapted from Semiconductor manufacturing and process control - May and Spanos. since the station yield can never be larger than 1. Consider a ... ................
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