SEMI S23-0705
Supply pressure: 4.9 x 105Pa (71 psi; 5 kg/cm2) UPW/DIW (under pressure) Supply pressure: 1.96 x 105 Pa (28.4 psi; 2 kg/cm2) UPW/DIW (ambient pressure) Power for purification. Heat Load Factors Heat removal via Air Specific Heat and Density of Air. Heat removal via … ................
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